Catalyst synthesis and evaluation using an integrated atomic layer deposition synthesis-catalysis testing tool
Camacho-Bunquin, Jeffrey, Shou, Heng, Aich, Payoli, Beaulieu, David R, Klotzsch, Helmut, Bachman, Stephen, Marshall, Christopher L, Hock, Adam, Stair, Peter
Published in Review of scientific instruments (01.08.2015)
Published in Review of scientific instruments (01.08.2015)
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Journal Article
Advances in microchannel amplifiers for maskless lithography
Tremsin, Anton S., Beaulieu, David R., Lockwood, Harry F.
Published in Microelectronic engineering (01.04.2006)
Published in Microelectronic engineering (01.04.2006)
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Journal Article
Conference Proceeding
Gas Manifold for Simultaneous Gas Property Control in Deposition Systems
Beaulieu, David R, McHugh, Jeffrey D, Trotter, Michael D, Kong, Darith
Year of Publication 31.08.2023
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Year of Publication 31.08.2023
Patent