Classification of different post-hyperdoping treatments for enhanced crystallinity of IR-sensitive femtosecond-laser processed silicon
Paulus, Simon, Roser, Michael, McKearney, Patrick, Will, Matthias, Schäfer, Sören, Kontermann, Stefan
Published in Semiconductor science and technology (01.02.2023)
Published in Semiconductor science and technology (01.02.2023)
Get full text
Journal Article