Carbon-containing group IV heterostructures on Si: properties and device applications
Osten, H.J, Barth, R, Fischer, G, Heinemann, B, Knoll, D, Lippert, G, Rücker, H, Schley, P, Röpke, W
Published in Thin solid films (26.05.1998)
Published in Thin solid films (26.05.1998)
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Journal Article
Conference Proceeding
Shallow junction formation by phosphorus diffusion from in situ spike-doped chemical vapor deposited amorphous silicon
Krüger, D., Schlote, J., Röpke, W., Kurps, R., Quick, Ch
Published in Microelectronic engineering (01.04.1995)
Published in Microelectronic engineering (01.04.1995)
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Journal Article
Collector Profile Design of SiGe-HBTs for Optimized Static and High-Frequency Performance
Heinemann, B., Ehwald, K.-E., Schley, P., Fischer, G., Herzel, F., Knoll, D., Morgenstern, T., Ropke, W., Winkler, W.
Published in ESSDERC '95: Proceedings of the 25th European Solid State Device Research Conference (01.09.1995)
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Published in ESSDERC '95: Proceedings of the 25th European Solid State Device Research Conference (01.09.1995)
Conference Proceeding
Comparison of P In Situ Spike Doped with as Implanted Poly Silicon Emitters Concerning Si/SiGe/Si HBT Application
Knoll, D., Heinemann, B., Ehwald, K.E., Schley, P., Ropke, W., Bolze, D., Schlote, J., Herzel, F., Fischer, G.
Published in ESSDERC '95: Proceedings of the 25th European Solid State Device Research Conference (01.09.1995)
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Published in ESSDERC '95: Proceedings of the 25th European Solid State Device Research Conference (01.09.1995)
Conference Proceeding
Modeling the effect of carbon on boron diffusion
Rucker, H., Heinemann, B., Ropke, W., Fischer, G., Lippert, G., Osten, H.J., Kurps, R.
Published in SISPAD '97. 1997 International Conference on Simulation of Semiconductor Processes and Devices. Technical Digest (1997)
Published in SISPAD '97. 1997 International Conference on Simulation of Semiconductor Processes and Devices. Technical Digest (1997)
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Conference Proceeding
Control of steep Boron profiles in Si/SiGe heterojunction bipolar transistors
Heinemann, B., Knoll, D., Fischer, G., Kruger, D., Lippert, G., Osten, H.J., Rucker, H., Ropke, W., Schley, P., Tillack, B.
Published in 27th European Solid-State Device Research Conference (1997)
Published in 27th European Solid-State Device Research Conference (1997)
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Conference Proceeding