Design and simulation of polysilicon micro tuning fork for ultrasonic frequency operation
Quiroz-Merino, G., Sanchez-Fraga, R., Baez-Medina, H., Ponce-Ponce, V. H., Mendoza-Acevedo, S.
Published in 2015 12th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE) (01.10.2015)
Published in 2015 12th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE) (01.10.2015)
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