Search Results - "Qi, Yuejing" :: K.UTB vyhledávací portál

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Learning Synchronous Control Based on Intelligent Methods for Ultra-Precision Stage Systems

by Zhou, Xin, Qi, Yuejing, Wu, Zhipeng, Qi, Wei, Li, Ailin
Published in IEEE access (2024)

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Journal Article

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Rigorous Simulation for Impact of Self-Aligned Multiple Patterning on Alignment

by Yao, Mingyi, Qi, Yuejing, Zhou, Guangying, Li, Liang, Jiang, Miao, Shi, Elly
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)

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Conference Proceeding

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Simulation study on the robustness of polar mark for incident light polarization states

by Zhou, Guangying, Qi, Yuejing, Yao, Mingyi, Li, Liang, Jiang, Miao, Shi, Jiangliu
Published in 2023 International Workshop on Advanced Patterning Solutions (IWAPS) (26.10.2023)

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Conference Proceeding

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Source mask optimization for extreme-ultraviolet lithography based on thick mask model and social learning particle swarm optimization algorithm

by Zhang, Zinan, Li, Sikun, Wang, Xiangzhao, Cheng, Wei, Qi, Yuejing
Published in Optics express (15.02.2021)

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Journal Article

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Inducing lasing in organic materials with low optical gain by three-dimensional plasmonic nanocavity arrays

by Han, Chunrui, Qi, Yuejing, Wang, Yu, Ye, Jianting
Published in Optics express (22.07.2019)

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Journal Article

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$A fast mask diffraction model towards rigorous simulation in terms of accuracy$

A fast mask diffraction model towards rigorous simulation in terms of accuracy

by Hu, Shaobo, Zhang, Zinan, Li, Sikun, Tang, Ming, Qi, Yuejing, Wang, Xiangzhao
Published in 2021 International Workshop on Advanced Patterning Solutions (IWAPS) (12.12.2021)

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Conference Proceeding

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Simulation optimization method and device for overlay error measurement equipment

by MENG LULU, LI YAOKUN, WU ZHIPENG, WANG DAN, QI YUEJING
Year of Publication 25.06.2024

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Patent

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Lens assembly and optical device

by MA JING, QI WEI, SU JIANI, QI YUEJING
Year of Publication 28.05.2024

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Patent

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Double-layer nested light path adjustment vibration isolation device

by QI WEI, MA JING, SU JIANI, QI YUEJING
Year of Publication 30.04.2024

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Patent

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Device and method for detecting curvature radius of cylindrical surface

by MENG LULU, YANG SHUMAN, JIN HAO, MA JING, QI WEI, SU JIANI, QI YUEJING
Year of Publication 02.02.2024

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Patent

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Multi-beam combination adjusting device and adjusting method

by LU ZENGXIONG, SHE CHANGMEI, LI JING, WANG PENGHUI, QI YUEJING
Year of Publication 08.06.2021

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Patent

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$Phase grating structure with enhanced diffraction efficiency of ninth diffraction order$

Phase grating structure with enhanced diffraction efficiency of ninth diffraction order

by LU ZENGXIONG, LI JING, YANG GUANGHUA, DING MINXIA, QI YUEJING
Year of Publication 04.06.2021

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Patent

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Detection device and method for focusing and leveling of optical system

by LU ZENGXIONG, CHEN JINXIN, LI JING, SU JIANI, GAO BIN, QI YUEJING
Year of Publication 22.04.2022

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Patent

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Model predictive motion control method and system for precision motion platform

by HAO CHAOYU, WU ZHIPENG, LI JING, YIN CHAO, ZONG MINGCHENG, QI YUEJING
Year of Publication 15.03.2022

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Patent

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Sampling signal synchronous control system

by MA HUIJUAN, ZHU SHIDONG, ZHANG QINGYANG, LI JING, DING MINXIA, QI YUEJING
Year of Publication 11.02.2022

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Patent

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Laser interferometer adjusting device

by MEI DONGBIN, LI BING, QI WEI, YANG GUANGHUA, QI YUEJING
Year of Publication 25.11.2015

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Patent

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Laser interferometer adjusting seat

by MEI DONGBIN, LI BING, QI WEI, YANG GUANGHUA, QI YUEJING
Year of Publication 21.10.2015

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Patent

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PHOTOELECTRIC DETECTION DEVICE HAVING CLOSED DESIGN AND CAPABLE OF PREVENTING DISTORTION OF OPTICAL SIGNALS AND IMPLEMENTATION METHOD THEREFOR

by MA, Huijuan, XU, Tianwei, DING, Minxia, CHEN, Jinxin, LI, Jing, QI, Yuejing, WANG, Dan, WU, Zhipeng
Year of Publication 02.06.2022

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Patent

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Debugging method for primary optical axis of optical system

by LU ZENGXIONG, LI JING, MA JING, SU JIANI, GAO BIN, QI YUEJING
Year of Publication 26.04.2022

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Patent

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Multi-interferometer combined application, installation and adjustment device

by CHEN JINXIN, LU ZENGXIONG, QI WEI, LI JING, YANG GUANGHUA, SU JIANI, QI YUEJING
Year of Publication 25.02.2022

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Patent

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