Inductively coupled plasma etching of CoFeB, CoZr, CoSm and FeMn thin films in interhalogen mixtures
Cho, H., Jung, K.B., Hays, D.C., Hahn, Y.B., Feng, T., Park, Y.D., Childress, J.R., Cadieu, F.J., Rani, R., Qian, X.R., Chen, L., Pearton, S.J.
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Published in Materials science & engineering. B, Solid-state materials for advanced technology (15.06.1999)
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Dry etch patterning of LaCaMnO3 and SmCo thin films
WANG, J. J, CHILDRESS, J. R, PEARTON, S. J, SHARIFI, F, DAHMEN, K. H, GILLMAN, E. S, CADIEU, F. J, RANI, R, QIAN, X. R, LI CHEN
Published in Journal of the Electrochemical Society (01.07.1998)
Published in Journal of the Electrochemical Society (01.07.1998)
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Mössbauer study of melt-spun Sm20Fe70Ti10 alloy
Qian, X. R., Chen, M. X., Chen, L., Jin, H. J., Chen, L. J., Xu, G. Q.
Published in Hyperfine interactions (01.04.1992)
Published in Hyperfine interactions (01.04.1992)
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