On monitoring of gas leak in the plasma vacuum process with optical emission spectroscopy
Pyun, S.C., Kwon, J.H., You, S.J., Seong, D.J., Kim, J.H., Shin, Y.H., Shin, J.S.
Published in Thin solid films (01.09.2010)
Published in Thin solid films (01.09.2010)
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