FEOL Monolithic Co-Integration of FeFET and CMOS on 8-Inch Wafer Using Laser Spike Annealing With Implementation of an FeFET Inverter
Kang, Bohyeon, An, Jehyun, Park, Jongseo, Hong, Giryun, Ham, Beomjoo, Pyo, Jaeseong, Ahn, Sung-Min, Baek, Rock-Hyun
Published in IEEE access (2024)
Published in IEEE access (2024)
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