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"Pyatigorsky, Grigory"
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Substrate polishing metrology using interference signals
by
PYATIGORSKY GRIGORY
,
BIRANG MANOOCHER
Year of Publication
15.10.2013
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SUBSTRATE POLISHING METROLOGY USING INTERFERENCE SIGNALS
by
PYATIGORSKY GRIGORY
,
BIRANG MANOOCHER
Year of Publication
03.05.2012
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Substrate polishing metrology using interference signals
by
Birang, Manoocher
,
Pyatigorsky
,
Grigory
Year of Publication
10.01.2012
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Substrate polishing metrology using interference signals
by
PYATIGORSKY GRIGORY
,
BIRANG MANOOCHER
Year of Publication
10.01.2012
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SUBSTRATE POLISHING METROLOGY USING INTERFERENCE SIGNALS
by
PYATIGORSKY GRIGORY
,
BIRANG MANOOCHER
Year of Publication
24.03.2011
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Substrate polishing metrology using interference signals
by
Birang, Manoocher
,
Pyatigorsky
,
Grigory
Year of Publication
30.11.2010
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Substrate polishing metrology using interference signals
by
PYATIGORSKY GRIGORY
,
BIRANG MANOOCHER
Year of Publication
30.11.2010
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SUBSTRATE POLISHING METROLOGY USING INTERFERENCE SIGNALS
by
PYATIGORSKY GRIGORY
,
BIRANG MANOOCHER
Year of Publication
23.09.2010
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Substrate polishing metrology using interference signals
by
Birang, Manoocher
,
Pyatigorsky
,
Grigory
Year of Publication
08.06.2010
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Substrate polishing metrology using interference signals
by
PYATIGORSKY GRIGORY
,
BIRANG MANOOCHER
Year of Publication
08.06.2010
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VERFAHREN ZUM LÖSEN EINES WERKSTÜCKES VON EINER ELEKTROSTATISCHEN HALTEPLATTE
by
PYATIGORSKY
,
GRIGORY
,
BIRANG, MANOOCHER
Year of Publication
02.03.2000
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Apparatus and method for in-situ monitoring of chemical mechanical polishing operations
by
BIRANG; MANOOCHER
,
PYATIGORSKY
;
GRIGORY
Year of Publication
12.10.1999
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RELEASING A WORKPIECE FROM AN ELECTROSTATIC CHUCK
by
PYATIGORSKY
,
GRIGORY
,
BIRANG, MANOOCHER
Year of Publication
23.06.1999
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RELEASING A WORKPIECE FROM AN ELECTROSTATIC CHUCK
by
PYATIGORSKY
,
GRIGORY
,
BIRANG, MANOOCHER
Year of Publication
16.07.1997
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Releasing a workpiece from an electrostatic chuck
by
BIRANG; MANOOCHER
,
PYATIGORSKY
;
GRIGORY
Year of Publication
18.03.1997
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RELEASING A WORKPIECE FROM AN ELECTROSTATIC CHUCK
by
PYATIGORSKY
,
GRIGORY
,
BIRANG, MANOOCHER
Year of Publication
13.03.1996
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Releasing a workpiece from an electrostatic chuck
by
BIRANG; MANOOCHER
,
PYATIGORSKY
;
GRIGORY
Year of Publication
17.10.1995
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RELEASING A WORKPIECE FROM AN ELECTROSTATIC CHUCK
by
PYATIGORSKY
,
GRIGORY
,
BIRANG, MANOOCHER
Year of Publication
14.09.1995
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POLISHING PAD
by
GLEASON ALLAN
,
PYATIGORSKY GRIGORY
,
BIRANG MANOOCHER
,
JOHANSSON NILS
Year of Publication
01.02.2007
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Verfahren zum Herstellen einer Vorrichtung zur In-Situ-Kontrolle und Bestimmung des Endes von chemisch-mechanischen Planiervorgängen
by
PYATIGORSKY
,
GRIGORY
,
BIRANG, MANOOCHER
,
JOHANSSON, NILS
,
GLEASON, ALLAN
Year of Publication
12.10.2006
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basic electric elements
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feeding of grinding, polishing, or lapping agents
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