Semiconductor interlevel shorts caused by hillock formation in Al-Cu metallization
Puttlitz, A.F., Ryan, J.G., Sullivan, T.D.
Published in Proceedings., 39th Electronic Components Conference (1989)
Published in Proceedings., 39th Electronic Components Conference (1989)
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Conference Proceeding
Design of precision capacitors for analog applications
St Onge, S.A., Franz, S.G., Puttlitz, A.F., Kalinoski, A., Johnson, B.E., El-Kareh, B.
Published in 1992 Proceedings 42nd Electronic Components & Technology Conference (1992)
Published in 1992 Proceedings 42nd Electronic Components & Technology Conference (1992)
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Conference Proceeding
Design of precision capacitors for analog applications
St. Onge, S.A., Franz, S.G., Puttlitz, A.F., Kalinoski, A., Johnson, B.E., El-Kareh, B.
Published in IEEE transactions on components, hybrids, and manufacturing technology (01.12.1992)
Published in IEEE transactions on components, hybrids, and manufacturing technology (01.12.1992)
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Journal Article
Conference Proceeding