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Year of Publication 10.11.2022
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Year of Publication 10.11.2022
Patent
Lightfields behind amplitude masks: Creating phase discontinuities
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Published in 2016 15th Workshop on Information Optics (WIO) (01.07.2016)
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Conference Proceeding
Lightfields behind amplitude and phase masks applications in high resolution proximity lithography
Scharf, Toralf, Puthankovilakam, Krishnaparvathy, Bernasconi, Johana, Myun-Sik Kim, Herzig, Hans Peter, Vogler, Uwe, Bramati, Arianna, Volkel, Reinhard
Published in 2015 14th Workshop on Information Optics (WIO) (01.06.2015)
Published in 2015 14th Workshop on Information Optics (WIO) (01.06.2015)
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Conference Proceeding