HF-Release of Sacrificial Layers in CMOS-integrated MOEMS structures
Döring, S, Friedrichs, M, Pufe, W, Schulze, M
Published in Journal of physics. Conference series (01.10.2016)
Published in Journal of physics. Conference series (01.10.2016)
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Journal Article
High quality r.f. sputtered metal oxides (Ta 2O 5, HfO 2) and their properties after annealing
Grüger, H., Kunath, Ch, Kurth, E., Sorge, S., Pufe, W., Pechstein, T.
Published in Thin solid films (30.01.2004)
Published in Thin solid films (30.01.2004)
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Journal Article
Novel 512 × 320 Tip-Tilt Micro Mirror Array in a CMOS-Integrated, Scalable Process Technology
Gehner, A., Durr, P., Kunze, D., Rudloff, D., Elgner, A., Heber, J., Frances, S., Skupsch, C., Torlee, H., Eckert, M., Friedrichs, M., Schmidt, J., Pufe, W., Doring, S., Hohle, C., Schulze, M., Wagner, M.
Published in 2018 International Conference on Optical MEMS and Nanophotonics (OMN) (01.07.2018)
Published in 2018 International Conference on Optical MEMS and Nanophotonics (OMN) (01.07.2018)
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Conference Proceeding
High quality r.f. sputtered metal oxides (Ta2O5, HfO2) and their properties after annealing
GRÜGER, H, KUNATH, Ch, KURTH, E, SORGE, S, PUFE, W, PECHSTEIN, T
Published in Thin solid films (2004)
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Published in Thin solid films (2004)
Conference Proceeding
Aluminum nitride thin film development using statistical methods
Conrad, H., Pufe, W., Schenk, H.
Published in 2011 International Students and Young Scientists Workshop "Photonics and Microsystems" (01.07.2011)
Published in 2011 International Students and Young Scientists Workshop "Photonics and Microsystems" (01.07.2011)
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Conference Proceeding