High-rate sputtering of thick PZT thin films for MEMS
Jacobsen, Harald, Prume, Klaus, Wagner, Bernhard, Ortner, Kai, Jung, Thomas
Published in Journal of electroceramics (01.10.2010)
Published in Journal of electroceramics (01.10.2010)
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Journal Article
Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals
PRUME, Klaus, MURALT, Paul, CALAME, Florian, SCHMITZ-KEMPEN, Thorsten, TIEDKE, Stephan
Published in Journal of electroceramics (01.12.2007)
Published in Journal of electroceramics (01.12.2007)
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Conference Proceeding
Journal Article
Compensation of the Parasitic Capacitance of a Scanning Force Microscope Cantilever Used for Measurements on Ferroelectric Capacitors of Submicron Size by Means of Finite Element Simulations
Prume, Klaus, Roelofs, Andreas, Schmitz, Thorsten, Reichenberg, Bernd, Tiedke, Stephan, Waser, Rainer
Published in Japanese Journal of Applied Physics (01.11.2002)
Published in Japanese Journal of Applied Physics (01.11.2002)
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Journal Article
Modelling and numerical simulation of the electrical, mechanical, and thermal coupled behaviour of Multilayer capacitors (MLCs)
Prume, Klaus, Franken, Klaus, Böttger, Ulrich, Waser, Rainer, Maier, Horst R
Published in Journal of the European Ceramic Society (01.08.2002)
Published in Journal of the European Ceramic Society (01.08.2002)
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Journal Article
METHOD AND DEVICE FOR CHARACTERIZING A SAMPLE BY MEANS OF DOUBLE-BEAM LASER INTERFEROMETRY
SCHMITZ-KEMPEN, THORSTEN, REICHENBERG, BERND, PRUME, KLAUS, TIEDKE, STEPHAN
Year of Publication 24.05.2007
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Year of Publication 24.05.2007
Patent