FLUID CONDUIT AND FLANGE FOR HIGH BIAS APPLICATIONS
GUZMAN, Martin Perez, PROUTY, Stephen D, RAVI, Sankaranarayanan, GARCIA, Alvaro, SCHMID, Andreas
Year of Publication 04.04.2024
Get full text
Year of Publication 04.04.2024
Patent
CONDITION SELECTABLE BACKSIDE GAS
Prouty, Stephen D, Banda, Sumanth, Perez-Guzman, Martin, Garcia de Gorordo, Alvaro, Dhindsa, Rajinder
Year of Publication 24.08.2023
Get full text
Year of Publication 24.08.2023
Patent
Condition selectable backside gas
Prouty, Stephen D, Banda, Sumanth, Perez-Guzman, Martin, Garcia de Gorordo, Alvaro, Dhindsa, Rajinder
Year of Publication 06.06.2023
Get full text
Year of Publication 06.06.2023
Patent
CONDITION SELECTABLE BACKSIDE GAS
Prouty, Stephen D, Banda, Sumanth, Perez-Guzman, Martin, Garcia de Gorordo, Alvaro, Dhindsa, Rajinder
Year of Publication 09.09.2021
Get full text
Year of Publication 09.09.2021
Patent
SELF-FILLING SOIL PROCESSING CHAMBER WITH DYNAMIC EXTRACTANT VOLUME
Prouty, Stephen D, Koshnick, Nicholas C, White, Justin S, Preiner, Michael J
Year of Publication 25.04.2019
Get full text
Year of Publication 25.04.2019
Patent
Self-filling soil processing chamber with dynamic extractant volume
Prouty, Stephen D, Koshnick, Nicholas C, White, Justin S, Preiner, Michael J
Year of Publication 01.01.2019
Get full text
Year of Publication 01.01.2019
Patent
In-situ apparatus for semiconductor process modules
SCHMIDT ANDREAS, STEPHEN D. PROUTY, SARODE VISHWANATH YOGANANDA, BABAYAN STEVEN E
Year of Publication 23.06.2023
Get full text
Year of Publication 23.06.2023
Patent
Semiconductor processing with cooled electrostatic chuck
SCHMIDT ANDREAS, STEPHEN D. PROUTY, SARODE VISHWANATH YOGANANDA, BABAYAN STEVEN E, NOUJAEIM AHMED A
Year of Publication 06.06.2023
Get full text
Year of Publication 06.06.2023
Patent
SELF-FILLING SOIL PROCESSING CHAMBER WITH DYNAMIC EXTRACTANT VOLUME
WHITE JUSTIN S, PROUTY STEPHEN D, PREINER MICHAEL J, KOSHNICK NICHOLAS C
Year of Publication 14.12.2017
Get full text
Year of Publication 14.12.2017
Patent
Substrate support assembly with arc resistant coolant conduit
SCHMIDT ANDREAS, STEPHEN D. PROUTY, GARCIA DE GORODO ALEJANDRO, NOUJAIM, ABDUL, A
Year of Publication 25.10.2022
Get full text
Year of Publication 25.10.2022
Patent
Self-filling soil processing chamber with dynamic extractant volume
Koshnick Nicholas C, Prouty Stephen D, Preiner Michael J, White Justin S
Year of Publication 22.08.2017
Get full text
Year of Publication 22.08.2017
Patent
Cooled substrate support assembly for radio frequency environments
SCHMIDT ANDREAS, STEPHEN D. PROUTY, PEREZ-GUZMAN MIGUEL, GARCIA DE GORODO ALEJANDRO, PARKHE VIJAY D, NOUJAIM, ABDUL, A
Year of Publication 01.11.2022
Get full text
Year of Publication 01.11.2022
Patent
SELF-FILLING SOIL PROCESSING CHAMBER WITH DYNAMIC EXTRACTANT VOLUME
WHITE JUSTIN S, PROUTY STEPHEN D, PREINER MICHAEL J, KOSHNICK NICHOLAS C
Year of Publication 22.09.2016
Get full text
Year of Publication 22.09.2016
Patent