Design-aware mask inspection
Kagalwalla, A A, Gupta, P, Progler, C, McDonald, S
Published in 2010 IEEE/ACM International Conference on Computer-Aided Design (ICCAD) (01.11.2010)
Published in 2010 IEEE/ACM International Conference on Computer-Aided Design (ICCAD) (01.11.2010)
Get full text
Conference Proceeding
Effective Mask Patterning Strategy as Design Complexity and CD Stability
Ham, Young, Choi, Yohan, Green, Michael, Ramadan, Mohamed, Progler, Chris
Published in 2019 China Semiconductor Technology International Conference (CSTIC) (01.03.2019)
Published in 2019 China Semiconductor Technology International Conference (CSTIC) (01.03.2019)
Get full text
Conference Proceeding
Methodology for Building MPC Model for Advanced Lithography Nodes
Ramadan, Mohamed, Dillon, Brian, Green, Michael, Ham, Young, Progler, Chris
Published in 2019 China Semiconductor Technology International Conference (CSTIC) (01.03.2019)
Published in 2019 China Semiconductor Technology International Conference (CSTIC) (01.03.2019)
Get full text
Conference Proceeding
Accurate Mask Model Approaches for Wafer Hot Spot Prepdition and Verificaition
Ham, Young, Lu, Colbert, Lee, HJ, Ramadan, Mohamed, Green, Michael, Progler, Chris
Published in 2020 China Semiconductor Technology International Conference (CSTIC) (26.06.2020)
Published in 2020 China Semiconductor Technology International Conference (CSTIC) (26.06.2020)
Get full text
Conference Proceeding
Line end shortening in CPL mask technology
Conley, Will, Kuijten, Jan Pieter, Verhappen, Arjan, van de Goor, Stefan, Litt, Lloyd, Wu, Wei, Lucas, Kevin, Roman, Bernie, Kasprowicz, Bryan, Progler, Chris, Socha, Robert, van den Broeke, Doug, Wampler, Kurt, Laidig, Tom, Hsu, Stephen, Schaefer, Erika, Cook, Pat
Published in Microelectronic engineering (01.03.2005)
Published in Microelectronic engineering (01.03.2005)
Get full text
Journal Article
Conference Proceeding
From energy storage to EnerNet: Smart grid for abundant energy
Boksha, Victor V., Foster, Richard O., Ignatiev, Alex N., Chow, Clara, Ryjov, Alexander P., Bulai, Pavel M., Progler, Chris, Hague, Edward, Wong, Ann Chai
Published in 2014 Saudi Arabia Smart Grid Conference (SASG) (01.12.2014)
Published in 2014 Saudi Arabia Smart Grid Conference (SASG) (01.12.2014)
Get full text
Conference Proceeding