Micro-fluid Flow In Microchannel
Jiang, X.N., Zhou, Z.Y., Yao, J., Li, Y., Ye, X.Y.
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
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Conference Proceeding
Thick Polycristalline Silicon For Surface Micromechanical Applications: Deposition, Structuring And Mechanical Characterization
Lange, P., Kirsten, M., Riethmuller, W., Wenk, B., Zwicker, G., Morante, J.R., Ericson, F., Schweitz, J.A.
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
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Conference Proceeding
Alignment Of Mask Patterns To Crystal Orientation
Ensell, G.
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
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Conference Proceeding
A Mems-based Miniature DNA Analysis System
Northrup, M.A., Gonzalez, C., Hadley, D., Hills, R.F., Landre, P., Lehew, S., Saw, R., Sninsky, J.J., Watson, R.
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
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Conference Proceeding
Metal Oxide Sensors
Meixner, H., Lampe, U.
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
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Conference Proceeding
CAD For Microelectromechanical Systems
Senturia, S.D.
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
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Conference Proceeding
A High-resolution Laser-based Deflection Measurement System For Characterizing Aluminum Electrostatic Actuators
Honer, K.A., Maluf, N.I., Martinez, E., Kovacs, G.T.A.
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
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Conference Proceeding
Optimized Temperature Pulse Sequences For The Enhancement Of Chemically-specific Response Patterns From Micro-hotplate Gas Sensors
Cavicchi, R.E., Suehle, J.S., Kreider, K.G., Gaitan, M., Chaparala, P.
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
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Conference Proceeding
Solid Electrolytes For Gas Sensing At High Temperatures. Multi Electrode Setup To Analyze Gas Mixtures
Reinhardt, G., Somov, S.I., Schonauer, U., Guth, U., Gopel, W.
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
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Conference Proceeding