A Vertical /spl Phi/-shape Transistor (V/spl Phi/T) cell for 1 Gbit DRAM and beyond
Maeda, S., Maegawa, S., Ipposhi, T., Nishimura, H., Kuriyama, H., Tanina, O., Inoue, Y., Nishimura, T., Tsubouchi, N.
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Get full text
Conference Proceeding
Simple, fast, 2.5-V CMOS logic with 0.25-/spl mu/m channel lengths and damascene interconnect
Koburger, C., Adkisson, J., Clark, W., Davari, B., Geissler, S., Givens, J., Hansen, H., Holmes, S., Lee, H.K., Lee, J., Luce, S., Martin, D., Mittl, S., Nakos, J., Stiffler, S.
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Get full text
Conference Proceeding
ClF/sub 3/ gas compound for particle free contact hole etching
Imai, S., Tamaki, T., Okada, S., Kubota, M., Nomura, N.
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Get full text
Conference Proceeding
Trench isolation technology with 1 /spl mu/m depth n- and p-wells for a full-CMOS SRAM cell with a 0.4 /spl mu/m n/sup +p/sup +/ spacing
Ishimaru, K., Gojohbori, H., Koike, H., Unno, Y., Sai, M., Matsuoka, F., Kakumu, M.
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Get full text
Conference Proceeding
A 0.5 /spl mu/m technology for advanced microcontroller applications
Sharma, U., Kuo-Tung Chang, Woo, M., Ko-Min Chang, Yeargain, J.R.
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Get full text
Conference Proceeding
A new titanium salicide process (DIET) for sub-quarter micron CMOS
Horiuchi, T., Wakabayashi, H., Iskigami, T., Nakamura, H., Mogami, T., Kunio, T., Okumura, K.
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Get full text
Conference Proceeding
Adhesion layerless submicron Al damascene interconnections using novel Al-CVD
Shinzawa, T., Sugai, K., Kobayashi, A., Hayashi, Y., Nakajima, T., Kishida, S., Okabayashi, H., Yako, T., Tsunenari, K., Murao, Y.
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Get full text
Conference Proceeding
A novel NAND structure with a BJT contact for the high density mask ROMs
Choi, J.D., Lee, W.K., Cho, S.H., Kang, N.S., Suh, K.D., Lim, H.K.
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Get full text
Conference Proceeding
1/f noise in poly-Si MOSFET and strong correlation with oxide traps and grain boundaries
Hashimoto, T., Aoki, M., Yamanaka, T., Kamigaki, Y., Nishida, T.
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Get full text
Conference Proceeding
Optimization of collector-substrate capacitance for mixed signal low power BiCMOS
Sung, J.M., Chiu, T.Y., Lau, K., Liu, T.M., Archer, V.D., Razavi, B., Swartz, R.G., Erceg, F.M., Ling, M.P., Moerschel, K.G., Prozonic, M.A., Long, T.P.
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Get full text
Conference Proceeding
Optimization of resolution-enhanced photolithography for a 256 Mb DRAM cell
Ferguson, R., Ausschnitt, C., Chang, I., Farrell, T., Hashimoto, K., Liebmann, L., Martino, R., Maurer, W., Mii, T., Moy, D., Neisser, M., Nunes, R., Samuels, D., Weed, J.
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Get full text
Conference Proceeding
Novel annular illumination using controlled phase and transparency
Sugihara, T., Mori, S., Fukushima, T., Takagi, J.
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Get full text
Conference Proceeding
A pass transistor design methodology for 256 Mbit DRAM and beyond
Chatterjee, A., Liu, J., Mozumder, P.K., Rodder, M., Chen, I.-C.
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Get full text
Conference Proceeding