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Published in ECS transactions (01.01.2010)
Published in ECS transactions (01.01.2010)
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16 MB DRAM trench depth characterization using dome scatterometry
Hatab, Ziad R., Prins, Steven L., Sohail, S., Naqvi, H., McNeil, John R.
Published in Applied surface science (01.02.1995)
Published in Applied surface science (01.02.1995)
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Conference Proceeding
IMPROVED SHALLOW TRENCH ISOLATION FOR INTEGRATED CIRCUIT
KIRKPATRICK, BRIAN, K, PRINS, STEVEN, L, MONTGOMERY, CLINT, L, XIONG, WEIZE
Year of Publication 23.04.2009
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Year of Publication 23.04.2009
Patent