Design and fabrication of a micro Wankel engine using MEMS technology
Lee, C.H., Jiang, K.C., Jin, P., Prewett, P.D.
Published in Microelectronic engineering (01.06.2004)
Published in Microelectronic engineering (01.06.2004)
Get full text
Journal Article
Deflection and load characterisation of bimorph actuators for bioMEMS and other applications
Al Aioubi, M.Y., Djakov, V., Huq, S.E., Prewett, P.D.
Published in Microelectronic engineering (01.06.2004)
Published in Microelectronic engineering (01.06.2004)
Get full text
Journal Article
Comparison of PMMA and SU-8 resist moulds for embossing of PZT to produce high-aspect-ratio microstructures using LIGA process
SCHNEIDER, A, SU, B, BUTTON, T. W, SINGLETON, L, WILHELMI, O, HUQ, S. E, PREWETT, P. D, LAWES, R. A
Published in Microsystem technologies : sensors, actuators, systems integration (01.05.2002)
Published in Microsystem technologies : sensors, actuators, systems integration (01.05.2002)
Get full text
Journal Article
Focused ion beams—microfabrication methods and applications (invited)
Get full text
Journal Article
Conference Proceeding
Field emission from amorphous diamond coated silicon tips
Huq, S.E, Prewett, P.D, She, J.C, Deng, S.Z, Xu, N.S
Published in Materials science & engineering. B, Solid-state materials for advanced technology (01.05.2000)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (01.05.2000)
Get full text
Journal Article
Conference Proceeding
Proximity correction of chemically amplified resists for electron beam lithography
Get full text
Journal Article
Conference Proceeding
A simple new method for the investigation of process latitude in E-beam lithography with positive resists
Kudryashov, V.A., Prewett, P.D., Michette, A.G.
Published in Microelectronic engineering (01.06.2000)
Published in Microelectronic engineering (01.06.2000)
Get full text
Journal Article
Sub10nm silicon field emitters produced by electron beam lithography and isotropic plasma etching
Get full text
Journal Article
Conference Proceeding
Fabrication and characterisation of ultra sharp silicon field emitters
Huq, S.E, Grayer, G.H, Moon, S.W, Prewett, P.D
Published in Materials science & engineering. B, Solid-state materials for advanced technology (27.02.1998)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (27.02.1998)
Get full text
Journal Article
Conference Proceeding
Low voltage e-beam irradiation: a new tool for suppression of airborne contamination effects in positive chemically amplified resists
Kudryashov, V.A., Prewett, P.D., Michette, A.G.
Published in Microelectronic engineering (01.03.1998)
Published in Microelectronic engineering (01.03.1998)
Get full text
Journal Article
Conference Proceeding
Gallium staining in FIB repair of photomasks
Prewett, PD, Eastwood, AW, Turner, GS, Watson, JG
Published in Microelectronic engineering (01.04.1993)
Published in Microelectronic engineering (01.04.1993)
Get full text
Journal Article
Characterization of embedded phase shift masks by reflectance-transmittance measurement
Get full text
Journal Article
Conference Proceeding
Laminated dry film resist for microengineering applications
Zhu, J., Holmes, A.S., Arnold, J., Lawes, R.A., Prewett, P.D.
Published in Microelectronic engineering (01.01.1996)
Published in Microelectronic engineering (01.01.1996)
Get full text
Journal Article
Transmission and side-lobe effect in attenuated phase shift masks
Cui, Zheng, Prewett, Philip D, Johnson, Stephen
Published in Microelectronic engineering (01.02.1995)
Published in Microelectronic engineering (01.02.1995)
Get full text
Journal Article
Conference Proceeding
Low energy electron beam lithography: Pattern distortion by charge trapped in the resist
Kudryashov, V.A., Krasnov, V.V., Prewett, P.D., Hall, T.J.
Published in Microelectronic engineering (01.02.1997)
Published in Microelectronic engineering (01.02.1997)
Get full text
Journal Article
Electron beam lithography using chemically-amplified resist: Resolution and profile control
Kudryashov, V.A., Krasnov, V.V., Huq, S.E., Prewett, P.D., Hall, T.J.
Published in Microelectronic engineering (01.01.1996)
Published in Microelectronic engineering (01.01.1996)
Get full text
Journal Article
FIB repair of defects in rim and attenuated phase shift masks
Cui, Zheng, Prewett, Philip D, Watson, John, Martin, Brian
Published in Microelectronic engineering (01.02.1995)
Published in Microelectronic engineering (01.02.1995)
Get full text
Journal Article
Conference Proceeding