H atom plasma diagnostics : a sensitive probe of temperature and purity
DUNLOP, J. R, TSEREPI, A. D, PREPPERNAU, B. L, CERNY, T. M, MILLER, T. A
Published in Plasma chemistry and plasma processing (01.03.1992)
Published in Plasma chemistry and plasma processing (01.03.1992)
Get full text
Journal Article
GaAs-Passivierung mittels Wasserstoffplasma
GOTTSCHO, RICHARD ALAN, MAPLEWOOD, NEW JERSEY 07040, US, PREPPERNAU, BRYAN L., FAIRBORN, OHIO, US
Year of Publication 25.01.1996
Get full text
Year of Publication 25.01.1996
Patent