EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
BUSCHE MATTHEW, STEVENOT SCOTT, GAFF KEITH WILLIAM, RICCI ANTHONY, POVOLNY HENRY S
Year of Publication 11.06.2024
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Year of Publication 11.06.2024
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EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
BUSCHE MATTHEW, STEVENOT SCOTT, GAFF KEITH WILLIAM, RICCI ANTHONY, POVOLNY HENRY S
Year of Publication 15.09.2022
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Year of Publication 15.09.2022
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EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
BUSCHE MATTHEW, STEVENOT SCOTT, GAFF KEITH WILLIAM, RICCI ANTHONY, POVOLNY HENRY S
Year of Publication 03.03.2022
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Year of Publication 03.03.2022
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High-rate deposition of amorphous silicon films using hot-wire CVD with a coil-shaped filament
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Conference Proceeding
Hot-wire deposition of amorphous and microcrystalline silicon using different gas excitations by a coiled filament
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Journal Article
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EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
BUSCHE MATTHEW, STEVENOT SCOTT, GAFF KEITH WILLIAM, RICCI ANTHONY, POVOLNY HENRY S
Year of Publication 06.07.2015
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Year of Publication 06.07.2015
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Selected Lifetime and Oscillator Strength Measurements in Si II
Schectman, Richard M, Povolny, Henry S, Curtis, Lorenzo J
Published in The Astrophysical journal (10.09.1998)
Published in The Astrophysical journal (10.09.1998)
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Journal Article
Edge seal configurations for a lower electrode assembly
Busche, Matthew, Gaff, Keith William, Povolny, Henry S, Stevenot, Scott, Ricci, Anthony
Year of Publication 12.01.2021
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Year of Publication 12.01.2021
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