Experimental study of a pre-ionized high power pulsed magnetron discharge
Vašina, P, Meško, M, Imbert, J C, Ganciu, M, Boisse-Laporte, C, de Poucques, L, Touzeau, M, Pagnon, D, Bretagne, J
Published in Plasma sources science & technology (01.08.2007)
Published in Plasma sources science & technology (01.08.2007)
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Journal Article
On the anisotropy and thermalization of the metal sputtered atoms in a low-pressure magnetron discharge
Poucques, L. de, Vitelaru, C, Minea, T. M, Bretagne, J, Popa, G
Published in Europhysics letters (01.04.2008)
Published in Europhysics letters (01.04.2008)
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Journal Article
Reduction of transient regime in fast preionized high-power pulsed-magnetron discharge
Vašina, P, Meško, M, Ganciu, M, Bretagne, J, Boisse-Laporte, C, Poucques, L. de, Touzeau, M
Published in Europhysics letters (01.11.2005)
Published in Europhysics letters (01.11.2005)
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Journal Article
Using a coupled optical and electrical monitoring method to follow the R-HiPIMS TiO2 deposition process drifts
Boivin, D, Jean-Marie-Désirée, R, Najah, A, Cuynet, S, de Poucques, L
Published in Physica scripta (01.04.2024)
Published in Physica scripta (01.04.2024)
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Journal Article
Formation mechanism of graphite hexagonal pyramids by argon plasma etching of graphite substrates
Glad, X, de Poucques, L, Bougdira, J
Published in Journal of physics. D, Applied physics (16.12.2015)
Published in Journal of physics. D, Applied physics (16.12.2015)
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Journal Article
Characterization of transport of titanium neutral atoms sputtered in Ar and Ar/N2 HIPIMS discharges
El Farsy, A, Ledig, J, Desecures, M, Bougdira, J, de Poucques, L
Published in Plasma sources science & technology (08.03.2019)
Published in Plasma sources science & technology (08.03.2019)
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Journal Article
Characterization of transport of titanium neutral atoms sputtered in Ar and Ar/N 2 HIPIMS discharges
El Farsy, A, Ledig, J, Desecures, M, Bougdira, J, de Poucques, L
Published in Plasma sources science & technology (08.03.2019)
Published in Plasma sources science & technology (08.03.2019)
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Journal Article
Towards control of TiO2 thickness film in R-HiPIMS process with a coupled optical and electrical monitoring of plasma
Boivin, D., Najah, A., Jean-Marie-Désirée, R., Noël, C., Henrion, G., Cuynet, S., De Poucques, L.
Published in Surface & coatings technology (15.03.2022)
Published in Surface & coatings technology (15.03.2022)
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Journal Article
Ionized particle transport in reactive HiPIMS discharge: correlation between the energy distribution functions of neutral and ionized atoms
El Farsy, A, Boivin, D, Noel, C, Hugon, R, Cuynet, S, Bougdira, J, de Poucques, L
Published in Plasma sources science & technology (01.06.2021)
Published in Plasma sources science & technology (01.06.2021)
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Journal Article
Fundamental aspects in non-reactive and reactive magnetron discharges
Bretagne, J, Laporte, C Boisse, Gousset, G, Leroy, O, Minea, T M, Pagnon, D, Poucques, L de, Touzeau, M
Published in Plasma sources science & technology (01.11.2003)
Published in Plasma sources science & technology (01.11.2003)
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Journal Article
Surface modification of Si-containing polymers during etching for bilayer lithography
Eon, D., de Poucques, L., Peignon, M.C., Cardinaud, Ch, Turban, G., Tserepi, A., Cordoyiannis, G., Valamontes, E.S., Raptis, I., Gogolides, E.
Published in Microelectronic engineering (01.07.2002)
Published in Microelectronic engineering (01.07.2002)
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Journal Article
Conference Proceeding
Agglomeration processes in carbonaceous dusty plasmas, experiments and numerical simulations
Dap, S, Lacroix, D, Patisson, F, Hugon, R, de Poucques, L, Bougdira, J
Published in New journal of physics (10.09.2010)
Published in New journal of physics (10.09.2010)
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Journal Article
Measurements on argon ion by tunable diode-laser induced fluorescence in a low magnetic field helicon configuration reactor
Bieber, T, Bardin, S, de Poucques, L, Brochard, F, Hugon, R, Vasseur, J-L, Bougdira, J
Published in Plasma sources science & technology (01.02.2011)
Published in Plasma sources science & technology (01.02.2011)
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Journal Article
Plasma synthesis of hexagonal-pyramidal graphite hillocks
Glad, X., de Poucques, L., Jaszczak, J.A., Belmahi, M., Ghanbaja, J., Bougdira, J.
Published in Carbon (New York) (01.09.2014)
Published in Carbon (New York) (01.09.2014)
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Journal Article