New micromechanical display using thin metallic films
Cadman, M.A., Perret, A., Porret, F., Vuilleumier, R., Weiss, P.
Published in IEEE electron device letters (01.01.1983)
Published in IEEE electron device letters (01.01.1983)
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Journal Article
Capacitive Silicon Differential Pressure Sensor
Hermann, J., Bourgeois, C., Porret, F., Kloeck, B.
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
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Conference Proceeding