High-efficiency p-i-n a-Si:H solar cells with low boron cross-contamination prepared in a large-area single-chamber PECVD reactor
Kroll, U., Bucher, C., Benagli, S., Schönbächler, I., Meier, J., Shah, A., Ballutaud, J., Howling, A., Hollenstein, Ch, Büchel, A., Poppeller, M.
Published in Thin solid films (22.03.2004)
Published in Thin solid films (22.03.2004)
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Journal Article
Hot Electron Emission Lithography: a method for efficient large area e-beam projection
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Journal Article
Conference Proceeding
High-efficiency p-i-n a-Si:H solar cells with low boron cross-contamination prepared in a large-area single-chamber PECVD reactor
KROLL, U, BUCHER, C, POPPELLER, M, BENAGLI, S, SCHÖNBÄCHLER, I, MEIER, J, SHAH, A, BALLUTAUD, J, HOWLING, A, HOLLENSTEIN, Ch, BÜCHEL, A
Published in Thin solid films (2004)
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Published in Thin solid films (2004)
Conference Proceeding