Dual valve fluid actuator assembly
Poon, Alex Ka Tim, Yang, Pai-Hsueh, Lee, Sandy, Keswani, Gaurav, Choi, Yeong-Jun, Mai, Rocky
Year of Publication 17.08.2021
Get full text
Year of Publication 17.08.2021
Patent
DUAL VALVE FLUID ACTUATOR ASSEMBLY
CHOI, Yeong-jun, POON, Alex, Ka Tim, KESWANI, Gaurav, LEE, Sandy, YANG, Pai-Hsueh, MAI, Rocky
Year of Publication 16.12.2020
Get full text
Year of Publication 16.12.2020
Patent
DUAL VALVE FLUID ACTUATOR ASSEMBLY
CHOI, Yeong-jun, POON, Alex, Ka Tim, KESWANI, Gaurav, LEE, Sandy, YANG, Pai-Hsueh, MAI, Rocky
Year of Publication 25.12.2019
Get full text
Year of Publication 25.12.2019
Patent
DUAL VALVE FLUID ACTUATOR ASSEMBLY
Poon, Alex Ka Tim, Yang, Pai-Hsueh, Lee, Sandy, Keswani, Gaurav, Choi, Yeong-Jun, Mai, Rocky
Year of Publication 12.12.2019
Get full text
Year of Publication 12.12.2019
Patent
Apparatus and methods for recovering fluid in immersion lithography
Poon, Alex Ka Tim, Kho, Leonard Wai Fung, Coon, Derek, Keswani, Gaurav
Year of Publication 16.10.2012
Get full text
Year of Publication 16.10.2012
Patent
Nozzle to help reduce the escape of immersion liquid from an immersion lithography tool
Poon, Alex Ka Tim, Kho, Leonard Wai Fung, Keswani, Guarav, Coon, Derek
Year of Publication 29.11.2011
Get full text
Year of Publication 29.11.2011
Patent