Fabrication of micromirrors with self-aligned metallization using silicon back-end-of-the-line processes
Ponoth, Shom S., Agarwal, Navnit T., Persans, Peter D., Plawsky, Joel L.
Published in Thin solid films (24.01.2005)
Published in Thin solid films (24.01.2005)
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Journal Article
Gate contact with vertical isolation from source-drain
Ponoth Shom S, Xie Ruilong, Horak David V, Pranatharthiharan Balasubramanian
Year of Publication 03.04.2018
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Year of Publication 03.04.2018
Patent
GATE CONTACT WITH VERTICAL ISOLATION FROM SOURCE-DRAIN
Ponoth Shom S, Xie Ruilong, Horak David V, Pranatharthiharan Balasubramanian
Year of Publication 15.06.2017
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Year of Publication 15.06.2017
Patent
Gate contact with vertical isolation from source-drain
Ponoth Shom S, Xie Ruilong, Horak David V, Pranatharthiharan Balasubramanian
Year of Publication 04.04.2017
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Year of Publication 04.04.2017
Patent
Self-aligned source/drain contacts
Pranatharthiharan, Balasubramanian, Ponoth, Shom S, Alptekin, Emre, Cheng, Kangguo, Adusumilli, Praneet
Year of Publication 06.11.2018
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Year of Publication 06.11.2018
Patent
GATE CONTACT WITH VERTICAL ISOLATION FROM SOURCE-DRAIN
Ponoth Shom S, Xie Ruilong, Horak David V, Pranatharthiharan Balasubramanian
Year of Publication 08.09.2016
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Year of Publication 08.09.2016
Patent
Gate contact with vertical isolation from source-drain
PONOTH SHOM S, HORAK DAVID V, PRANATHARTHIHARAN BALASUBRAMANIAN, XIE RUILONG
Year of Publication 24.05.2016
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Year of Publication 24.05.2016
Patent
GATE CONTACT WITH VERTICAL ISOLATION FROM SOURCE-DRAIN
PONOTH SHOM S, HORAK DAVID V, PRANATHARTHIHARAN BALASUBRAMANIAN, XIE RUILONG
Year of Publication 10.12.2015
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Year of Publication 10.12.2015
Patent
Gate contact with vertical isolation from source-drain
PONOTH SHOM S, HORAK DAVID V, PRANATHARTHIHARAN BALASUBRAMANIAN, XIE RUILONG
Year of Publication 29.09.2015
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Year of Publication 29.09.2015
Patent
GATE CONTACT WITH VERTICAL ISOLATION FROM SOURCE-DRAIN
PONOTH SHOM S, HORAK DAVID V, PRANATHARTHIHARAN BALASUBRAMANIAN, XIE RUILONG
Year of Publication 23.07.2015
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Year of Publication 23.07.2015
Patent
SELF-ALIGNED SOURCE/DRAIN CONTACTS
Alptekin Emre, Cheng Kangguo, Ponoth Shom S, Adusumilli Praneet, Pranatharthiharan Balasubramanian
Year of Publication 27.04.2017
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Year of Publication 27.04.2017
Patent
Self-aligned source/drain contacts
Alptekin Emre, Cheng Kangguo, Ponoth Shom S, Adusumilli Praneet, Pranatharthiharan Balasubramanian
Year of Publication 21.02.2017
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Year of Publication 21.02.2017
Patent
SELF-ALIGNED SOURCE/DRAIN CONTACTS
Alptekin Emre, Cheng Kangguo, Ponoth Shom S, Adusumilli Praneet, Pranatharthiharan Balasubramanian
Year of Publication 08.12.2016
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Year of Publication 08.12.2016
Patent
Forming isolated fins from a substrate
Yamashita Tenko, Standaert Theodorus E, Cheng Kangguo, Ponoth Shom S, Pranatharthiharan Balasubramanian
Year of Publication 16.08.2016
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Year of Publication 16.08.2016
Patent
REDUCED EXTERNAL RESISTANCE FINFET DEVICE
PONOTH SHOM S, STANDAERT THEODORUS E, YAMASHITA TENKO, CHENG KANGGUO, SREENIVASAN RAGHAVASIMHAN
Year of Publication 07.07.2016
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Year of Publication 07.07.2016
Patent
Spacer replacement for replacement metal gate semiconductor devices
PONOTH SHOM S, STANDAERT THEODORUS E, SANKARAPANDIAN MUTHUMANICKAM, YAMASHITA TENKO, MEHTA SANJAY C
Year of Publication 21.06.2016
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Year of Publication 21.06.2016
Patent
Reduced external resistance finFET device
PONOTH SHOM S, STANDAERT THEODORUS E, YAMASHITA TENKO, CHENG KANGGUO, SREENIVASAN RAGHAVASIMHAN
Year of Publication 14.06.2016
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Year of Publication 14.06.2016
Patent
Method and structure for robust finFET replacement metal gate integration
PONOTH SHOM S, STANDAERT THEODORUS E, YAMASHITA TENKO, CHENG KANGGUO, SREENIVASAN RAGHAVASIMHAN
Year of Publication 23.02.2016
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Year of Publication 23.02.2016
Patent
Fin capacitor employing sidewall image transfer
PONOTH SHOM S, STANDAERT THEODORUS E, YAMASHITA TENKO, DIVAKARUNI RAMACHANDRA, CHENG KANGGUO
Year of Publication 29.12.2015
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Year of Publication 29.12.2015
Patent