Creating a Monocrystalline Membrane via Etching and Sealing of Nanoholes Considering its Sealing Behavior
Fiedler, H.L., Ebschke, S., Poloczek, R.R., Kallis, Klaus T.
Published in Journal of nano research (01.10.2013)
Published in Journal of nano research (01.10.2013)
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Journal Article
Optimization of reactive ion etching processes using desirability
Brabender, Stephan, Kallis, Klaus T., Keller, Lars O., Poloczek, Remigius R., Fiedler, Horst L.
Published in Microelectronic engineering (01.05.2010)
Published in Microelectronic engineering (01.05.2010)
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Journal Article
Conference Proceeding
Planar technology integration of monocrystalline Silicon-membranes using nanoholes
Ebschke, S., Poloczek, R. R., Kallis, K. T., Fiedler, H. L.
Published in 2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013) (01.08.2013)
Published in 2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013) (01.08.2013)
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Conference Proceeding
Journal Article
A monocrystalline absolute pressure sensor with a pseudo-MOSFET read-out device for life-science applications
Ebschke, S., Poloczek, R. R., Kallis, K. T., Fiedler, H. L.
Published in 2013 IEEE SENSORS (01.11.2013)
Published in 2013 IEEE SENSORS (01.11.2013)
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Conference Proceeding
Lithography independent nanostructuring of Bi2Te3 thermoelectric devices
Merten, D., Kallis, K. T., Giebel, F. J., Zimmermann, J., Poloczek, R.P., Fiedler, H. L., Lilienthal, P.
Published in 2017 14th IEEE India Council International Conference (INDICON) (01.12.2017)
Published in 2017 14th IEEE India Council International Conference (INDICON) (01.12.2017)
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Conference Proceeding