Using a Novel Solvent-based Technology to Preserve Low-k Material when Removing Gap Fill Material
Franklin, Cole, Rector, Allison, Pfettscher, Don, Pollard, Kimberly, Scheele, Diane
Published in ECS transactions (01.01.2009)
Published in ECS transactions (01.01.2009)
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Journal Article
Chemical Vapor Deposition of Cerium Oxide Using the Precursors [Ce(hfac)3(glyme)]
Pollard, Kimberly D, Jenkins, Hilary A, Puddephatt, Richard J
Published in Chemistry of materials (01.03.2000)
Published in Chemistry of materials (01.03.2000)
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Journal Article
Dynamic multi-purpose composition for the removal of photoresists and method for its use
CHAN RAYMOND, POLLARD KIMBERLY D, PHENIS MICHAEL T, KIRKPATRICK LAURI K, SCHEELE DIANE M
Year of Publication 03.05.2007
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Year of Publication 03.05.2007
Patent
Yttrium β-diketonate complexes with triglyme: ionic and neutral isomers and outer-sphere co-ordination of triglyme
Pollard, Kimberly D., Vittal, Jagadese J., Yap, Glenn P. A., Puddephatt, Richard J.
Published in Journal of the Chemical Society. Dalton transactions (1998)
Published in Journal of the Chemical Society. Dalton transactions (1998)
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Journal Article