Broadband normal-incidence mirrors for a range of 111–138 Å based on an a-periodic Mo/Be multilayer structure
Barysheva, M. M., Garakhin, S. A., Kolesnikov, A. O., Pirozhkov, A. S., Polkovnikov, V. N., Ragozin, E. N., Shatokhin, A. N., Smertin, R. M., Svechnikov, M. V., Vishnyakov, E. A.
Published in Optical materials express (01.09.2021)
Published in Optical materials express (01.09.2021)
Get full text
Journal Article
Conversion efficiency of a laser-plasma source based on a Xe jet in the vicinity of a wavelength of 11 nm
Chkhalo, N. I., Garakhin, S. A., Lopatin, A. Ya, Nechay, A. N., Pestov, A. E., Polkovnikov, V. N., Salashchenko, N. N., Tsybin, N. N., Zuev, S. Yu
Published in AIP advances (01.10.2018)
Published in AIP advances (01.10.2018)
Get full text
Journal Article
Sputter depth profiling of Mo/B4C/Si and Mo/Si multilayer nanostructures: A round-robin characterization by different techniques
Ber, B., Bábor, P., Brunkov, P.N., Chapon, P., Drozdov, M.N., Duda, R., Kazantsev, D., Polkovnikov, V.N., Yunin, P., Tolstogouzov, A.
Published in Thin solid films (01.07.2013)
Published in Thin solid films (01.07.2013)
Get full text
Journal Article
Comparison of approaches in the manufacture of broadband mirrors for the EUV range: aperiodic and stack structures
Barysheva, M.M., Garakhin, S.A., Zuev, S.Yu, Polkovnikov, V.N., Salashchenko, N.N., Svechnikov, M.V., Chkhalo, N.I., Yulin, S.
Published in Quantum electronics (Woodbury, N.Y.) (01.04.2019)
Published in Quantum electronics (Woodbury, N.Y.) (01.04.2019)
Get full text
Journal Article
Study of oxidation processes in Mo/Be multilayers
Nechay, A. N., Chkhalo, N. I., Drozdov, M. N., Garakhin, S. A., Pariev, D. E., Polkovnikov, V. N., Salashchenko, N. N., Svechnikov, M. V., Vainer, Yu. A., Meltchakov, E., Delmotte, F.
Published in AIP advances (01.07.2018)
Published in AIP advances (01.07.2018)
Get full text
Journal Article
Optimization of Composition, Synthesis, and Study of Broadband Multilayer Mirrors for the EUV Spectral Range
Barysheva, M. M., Garakhin, S. A., Zuev, S. Yu, Polkovnikov, V. N., Salashchenko, N. N., Svechnikov, M. V., Smertin, R. M., Chkhalo, N. I., Meltchakov, E.
Published in Technical physics (01.11.2019)
Published in Technical physics (01.11.2019)
Get full text
Journal Article
Laboratory reflectometer for the investigation of optical elements in a wavelength range of 5-50 nm: description and testing results
Garakhin, S.A., Zabrodin, I.G., Zuev, S.E., Kas'kov, I.A., Lopatin, A.Ya, Nechay, A.N., Polkovnikov, V.N., Salashchenko, N.N., Tsybin, N.N., Chkhalo, N.I., Svechnikov, M.V.
Published in Quantum electronics (Woodbury, N.Y.) (01.05.2017)
Published in Quantum electronics (Woodbury, N.Y.) (01.05.2017)
Get full text
Journal Article
Influence of Thermal Annealing on the Properties of Multilayer Mo/Be Mirrors
Smertin, R. M., Garakhin, S. A., Zuev, S. Yu, Nechai, A. N., Polkovnikov, V. N., Salashchenko, N. N., Svechnikov, M. V., Sertsu, M. G., Sokolov, A., Chkhalo, N. I., Schäfers, F., Yunin, P. A.
Published in Technical physics (01.11.2019)
Published in Technical physics (01.11.2019)
Get full text
Journal Article
Al/Zr-based multilayer mirrors with record-breaking reflectivity
Polkovnikov, V N, Chkhalo, N I, Garakhin, S A, Salashchenko, N N, Zuev, S Yu
Published in Optics letters (15.08.2024)
Published in Optics letters (15.08.2024)
Get more information
Journal Article
Beryllium-based multilayer X-ray optics
Polkovnikov, V N, Salashchenko, N N, Svechnikov, M V, Chkhalo, N I
Published in Physics Uspekhi (01.01.2020)
Published in Physics Uspekhi (01.01.2020)
Get full text
Journal Article
Influence of Mo interlayers on the microstructure of layers and reflective characteristics of Ru/Be multilayer mirrors
Smertin, R M, Chkhalo, N I, Drozdov, M N, Garakhin, S A, Zuev, S Yu, Polkovnikov, V N, Salashchenko, N N, Yunin, P A
Published in Optics express (19.12.2022)
Published in Optics express (19.12.2022)
Get full text
Journal Article
Influence of barrier interlayers on the performance of Mo/Be multilayer mirrors for next-generation EUV lithography
Svechnikov, M V, Chkhalo, N I, Gusev, S A, Nechay, A N, Pariev, D E, Pestov, A E, Polkovnikov, V N, Tatarskiy, D A, Salashchenko, N N, Schäfers, F, Sertsu, M G, Sokolov, A, Vainer, Y A, Zorina, M V
Published in Optics express (24.12.2018)
Published in Optics express (24.12.2018)
Get full text
Journal Article
Advanced materials for multilayer mirrors for extreme ultraviolet solar astronomy
Bogachev, S A, Chkhalo, N I, Kuzin, S V, Pariev, D E, Polkovnikov, V N, Salashchenko, N N, Shestov, S V, Zuev, S Y
Published in Applied optics. Optical technology and biomedical optics (20.03.2016)
Published in Applied optics. Optical technology and biomedical optics (20.03.2016)
Get more information
Journal Article
Quantum Confinement Effect in a Nanoscale Mo/Si Multilayer Structure
Kumar, N, Kozakov, A. T, Nezhdanov, A. V, Smertin, R. M, Polkovnikov, V. N, Chkhalo, N. I, Mashin, A. I, Nikolskii, A. N, Scrjabin, A. A, Zuev, S. Y
Published in Journal of physical chemistry. C (13.08.2020)
Published in Journal of physical chemistry. C (13.08.2020)
Get full text
Journal Article
Ion-beam polishing of fused silica substrates for imaging soft x-ray and extreme ultraviolet optics
Chkhalo, N I, Churin, S A, Mikhaylenko, M S, Pestov, A E, Polkovnikov, V N, Salashchenko, N N, Zorina, M V
Published in Applied optics. Optical technology and biomedical optics (20.02.2016)
Published in Applied optics. Optical technology and biomedical optics (20.02.2016)
Get more information
Journal Article
Investigation of physical properties of Si crystallites in W/Si multilayers
Chkhalo, N. I., Garakhin, S. A., Kumar, N., Nikolaev, K. V., Polkovnikov, V. N., Rogachev, A., Svechnikov, M. V., Tatarsky, D. A., Yakunin, S. N.
Published in Journal of applied crystallography (01.12.2022)
Published in Journal of applied crystallography (01.12.2022)
Get full text
Journal Article
Highly reflective Ru/Y multilayer mirrors for the spectral range of 9-11 nm
Polkovnikov, V. N., Shaposhnikov, R. A., Zuev, S. Yu, Svechnikov, M. V., Sertsu, M. G., Sokolov, A., Schäfers, F., Chkhalo, N. I.
Published in Optics express (23.05.2022)
Published in Optics express (23.05.2022)
Get full text
Journal Article