Study of structure and surface modification of silicon-on-insulator (SOI) devices synthesized by dual ion implantation
Polji, Rucha H., Yadav, A.D., Dubey, S.K., Kumar, P., Kanjilal, D.
Published in Surface & coatings technology (15.06.2009)
Published in Surface & coatings technology (15.06.2009)
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Journal Article
Conference Proceeding
HI-ERDA, Micro-Raman and HRXRD studies of buried silicon oxynitride layers synthesized by dual ion implantation
Polji, Rucha H., Yadav, A.D., Dubey, S.K., Khan, Saif A., Avasthi, D.K., Gundu Rao, T.K.
Published in Vacuum (22.05.2009)
Published in Vacuum (22.05.2009)
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Journal Article
Synthesis of buried silicon oxynitride layers by ion implantation for silicon-on-insulator (SOI) structures
Yadav, A.D., Polji, Rucha H., Singh, Vibha, Dubey, S.K., Gundu Rao, T.K.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.04.2006)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.04.2006)
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