A high precision micro/nano CMM using piezoresistive tactile probes
Dai, Gaoliang, Bütefisch, Sebastian, Pohlenz, Frank, Danzebrink, Hans-Ulrich
Published in Measurement science & technology (01.08.2009)
Published in Measurement science & technology (01.08.2009)
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Journal Article
Accurate and traceable calibration of one-dimensional gratings
Dai, Gaoliang, Koenders, Ludger, Pohlenz, Frank, Dziomba, Thorsten, Danzebrink, Hans-Ulrich
Published in Measurement science & technology (01.06.2005)
Published in Measurement science & technology (01.06.2005)
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Journal Article
Accurate and traceable calibration of two-dimensional gratings
Dai, Gaoliang, Pohlenz, Frank, Dziomba, Thorsten, Xu, Min, Diener, Alexander, Koenders, Ludger, Danzebrink, Hans-Ulrich
Published in Measurement science & technology (01.02.2007)
Published in Measurement science & technology (01.02.2007)
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Journal Article
Accurate and traceable measurement of nano- and microstructures
Dai, Gaoliang, Pohlenz, Frank, Xu, Min, Koenders, Ludger, Danzebrink, Hans-Ulrich, Wilkening, Günter
Published in Measurement science & technology (01.03.2006)
Published in Measurement science & technology (01.03.2006)
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Journal Article
Comparison of Different Hardness Definitions Usable for Micro- and Nanoindentation
Pohlenz, Frank, Herrmann, Konrad, Seemann, Reiner, Menelao, Febo
Published in International journal of materials research (12.01.2022)
Published in International journal of materials research (12.01.2022)
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Journal Article
Nanoindentation of crystalline silicon pillars fabricated by soft UV nanoimprint lithography and cryogenic deep reactive ion etching
Hamdana, Gerry, Puranto, Prabowo, Langfahl-Klabes, Jannick, Li, Zhi, Pohlenz, Frank, Xu, Min, Granz, Tony, Bertke, Maik, Wasisto, Hutomo Suryo, Brand, Uwe, Peiner, Erwin
Published in Sensors and actuators. A. Physical. (01.11.2018)
Published in Sensors and actuators. A. Physical. (01.11.2018)
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Journal Article
Nanoindentation of crystalline silicon pillars fabricated by soft UV nanoimprint lithography and cryogenic deep reactive ion etching
Hamdana, Gerry, Puranto, Prabowo, Langfahl-Klabes, Jannick, Li, Zhi, Pohlenz, Frank, Granz, Tony, Peiner, Erwin, Bertke, Maik, Wasisto, Hutomo Suryo, Xu, Min, Brand, Uwe
Published in Sensors and actuators. A. Physical. (01.01.2019)
Published in Sensors and actuators. A. Physical. (01.01.2019)
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Journal Article
Traceable Nanomechanical Metrology of GaN Micropillar Array
Fatahilah, Muhammad Fahlesa, Puranto, Prabowo, Yu, Feng, Langfahl‐Klabes, Jannick, Felgner, André, Li, Zhi, Xu, Min, Pohlenz, Frank, Strempel, Klaas, Peiner, Erwin, Brand, Uwe, Waag, Andreas, Wasisto, Hutomo Suryo
Published in Advanced engineering materials (01.10.2018)
Published in Advanced engineering materials (01.10.2018)
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Journal Article
A metrological large range atomic force microscope with improved performance
Dai, Gaoliang, Wolff, Helmut, Pohlenz, Frank, Danzebrink, Hans-Ulrich
Published in Review of scientific instruments (01.04.2009)
Published in Review of scientific instruments (01.04.2009)
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Journal Article
Indentation modulus and hardness investigation of crystalline silicon surfaces treated by inductively coupled plasma reactive ion etching
Puranto, Prabowo, Hamdana, Gerry, Pohlenz, Frank, Langfahl-Klabes, Jannick, Daul, Lars, Li, Zhi, Wasisto, Hutomo Suryo, Peiner, Erwin, Brand, Uwe
Published in Journal of physics. Conference series (01.09.2019)
Published in Journal of physics. Conference series (01.09.2019)
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Journal Article
Quantitative analysis of nano-wear on DLC coatings by AFM
Dai, Gaoliang, Pohlenz, Frank, Felgner, André, Bosse, Harald, Kunzmann, Horst
Published in CIRP annals (2013)
Published in CIRP annals (2013)
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Journal Article
Accurate and traceable calibration of two-dimensional gratings
Dai, Gaoliang, Pohlenz, Frank, Dziomba, Thorsten, Xu, Min, Diener, Alexander, Koenders, Ludger, Danzebrink, Hans-Ulrich
Published in Measurement science & technology (01.02.2007)
Published in Measurement science & technology (01.02.2007)
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Journal Article
Accurate and traceable calibration of one-dimensional gratings
Dai, Gaoliang, Koenders, Ludger, Pohlenz, Frank, Dziomba, Thorsten, Danzebrink, Hans-Ulrich
Published in Measurement science & technology (01.06.2005)
Published in Measurement science & technology (01.06.2005)
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Journal Article
Nanoscale surface measurements at sidewalls of nano- and micro-structures
Dai, Gaoliang, Wolff, Helmut, Weimann, Thomas, Xu, Min, Pohlenz, Frank, Danzebrink, Hans-Ulrich
Published in Measurement science & technology (01.02.2007)
Published in Measurement science & technology (01.02.2007)
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Journal Article
Accurate and traceable measurement of nano- and microstructures
Dai, Gaoliang, Pohlenz, Frank, Xu, Min, Koenders, Ludger, Danzebrink, Hans-Ulrich, Wilkening, Gunter
Published in Measurement science & technology (01.03.2006)
Published in Measurement science & technology (01.03.2006)
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Journal Article
A neural network approach to correcting nonlinearity in optical interferometers
Li, Zhi, Herrmann, Konrad, Pohlenz, Frank
Published in Measurement science & technology (01.03.2003)
Published in Measurement science & technology (01.03.2003)
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Journal Article