Simulation of Silicon Carbide Sputtering by a Focused Gallium Ion Beam
Rumyantsev, A. V., Podorozhniy, O. V., Volkov, R. L., Borgardt, N. I.
Published in Semiconductors (Woodbury, N.Y.) (01.12.2022)
Published in Semiconductors (Woodbury, N.Y.) (01.12.2022)
Get full text
Journal Article