Enhanced broadband IR absorption and electrical characteristics of silicon variably hyperdoped by sulfur (1018-1021 cm−3) by ion implantation/pulsed laser annealing
Podlesnykh, I.M., Kovalev, M.S., Nastulyavichus, A.A., Stsepuro, N.G., Pushkarev, S.S., Kozlova, E.A., Dravin, V.A., Vlasov, A.I., Platonov, P.V., Kudryashov, S.I.
Published in Materials science in semiconductor processing (01.12.2024)
Published in Materials science in semiconductor processing (01.12.2024)
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Journal Article
Pulsed laser annealing of sulfur hyperdoped silicon prepared by ion implantation
Podlesnykh, I.M., Kovalev, M.S., Batalov, R.I.
Published in 2024 International Conference Laser Optics (ICLO) (01.07.2024)
Published in 2024 International Conference Laser Optics (ICLO) (01.07.2024)
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Conference Proceeding