Composition, structure, and magnetic properties of SiCxNyFez films produced by the PECVD method from a gas mixture of 1,1,1,3,3,3-hexamethyldisilazane, ferrocene, and helium
Plekhanov, A.G., Maksimovskiy, E.A., Kriventsov, V.V., Korolkov, I.V., Saraev, A.A., Lavrov, A.N., Grebenkina, M.A., Kolodin, A.N., Trunova, V.A.
Published in Colloids and surfaces. A, Physicochemical and engineering aspects (20.12.2022)
Published in Colloids and surfaces. A, Physicochemical and engineering aspects (20.12.2022)
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Journal Article
Synthesis of Highly Transparent Si[C.sub.x][N.sub.y][O.sub.z]:H Films via Plasma-Chemical Decomposition of 1,1,3,3,5,5-Hexamethylcyclotrisilazane, Oxygen, and Nitrogen Gas Mixture
Plekhanov, A.G, Fainer, N.I, Maksimovskiy, E.A, Shayapov, V.R, Yushina, I.V, Khomyakov, M.N
Published in Russian journal of general chemistry (01.11.2019)
Published in Russian journal of general chemistry (01.11.2019)
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Journal Article