Vyzkoušejte nový nástroj s podporou AI
Summon Research Assistant
BETA
Loading…
Efficacy of boron nitride encapsulation against plasma-processing of 2D semiconductor layers
Kumar, Pawan, Figueroa, Kelotchi S., Foucher, Alexandre C., Jo, Kiyoung, Acero, Natalia, Stach, Eric A., Jariwala, Deep
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01.05.2021)
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01.05.2021)
Get full text
Journal Article
Loading…
Synthesis of ultra-high temperature metal carbides by atmospheric DC arc plasma processing
Pak, Alexander, Mamontov, Gennady, Gumovskaya, Arina, Vassilyeva, Yuliya
Published in AIP conference proceedings (13.10.2022)
Published in AIP conference proceedings (13.10.2022)
Get full text
Journal Article
Conference Proceeding
Loading…
Modeling the conditions for obtaining nanostructures during ion-plasma processing taking into account the quantum-mechanical properties of electrode material
Shyrokyi, Yurii, Sysoiev, Iurii, Fesenko, Yevhen
Published in Avìacìjno-kosmìčna tehnìka ì tehnologìâ (20.06.2024)
Published in Avìacìjno-kosmìčna tehnìka ì tehnologìâ (20.06.2024)
Get full text
Journal Article
Loading…
Loading…
Loading…
Loading…
Loading…
Loading…
Electron Scattering in Gases — from Cross Sections to Plasma Modeling
Year of Publication 2022
Get full text
eBook
Loading…
PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD
Year of Publication 07.03.2023
Get full text
Patent
Loading…
Loading…
Loading…
Loading…
Loading…
Loading…
Loading…
Plasma processing apparatus and plasma processing method
WADA TOSHIHIRO, HIROSHIMA MITSURU, OKITA SHOGO, OKUNE MITSUHIRO, WATANABE SYOUZOU, ASAKURA HIROMI
Year of Publication 18.03.2014
Get full text
Year of Publication 18.03.2014
Patent
Loading…
Plasma processing apparatus
IZAWA MASARU, YOKOGAWA KENETSU, KOBAYASHI HIROYUKI, MAEDA KENJI, KANEKIYO TADAMITSU
Year of Publication 26.05.2015
Get full text
Year of Publication 26.05.2015
Patent
Loading…
Plasma processing apparatus and method
Koshiishi, Akira, Iwata, Manabu, Kobayashi, Noriyuki, Kibi, Kazuo, Koshimizu, Chishio, Yano, Daisuke, Saito, Masashi, Yamazaki, Hiroki, Yamazawa, Yohei, Ohya, Yoshinobu, Sugimoto, Masaru, Hanaoka, Hidetoshi, Ohtani, Ryuji, Matsumoto, Naoki, Hayami, Toshihiro, Sato, Manabu, Hinata, Kunihiko
Year of Publication 01.12.2020
Get full text
Year of Publication 01.12.2020
Patent