Study of fluorine stability in fluoro-silicate glass and effects on dielectric properties
Passemard, Gérard, Fugier, Pascal, Noel, Patrice, Pires, Fabrice, Demolliens, Olivier
Published in Microelectronic engineering (1997)
Published in Microelectronic engineering (1997)
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Conference Proceeding
Process optimization of copper MOCVD using modeling experimental design
Mouche, Marie-José, Mermet, Jean-Luc, Pires, Fabrice, Richard, Emmanuel, Torres, Joaquin, Palleau, Jean, Braud, François
Published in Applied surface science (01.10.1995)
Published in Applied surface science (01.10.1995)
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