Micromolding of Ni-P for the Realization of a 3D Electrostatic Energy Harvesting MEMS
Risquez, Sarah, Woytasik, Marion, Cai, Huijuan, Philippe, Hadrien, Bayle, Fabien, Lefeuvre, Elie, Moulin, Johan
Published in ECS transactions (29.07.2016)
Published in ECS transactions (29.07.2016)
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Journal Article
Titanium isotropic and anisotropic etching for MEMS applications
Ettouri, Rim, Tillocher, Thomas, Lefaucheux, Philippe, Boutaud, Bertrand, Phung, Jodie, Philippe, Hadrien, Dussart, Remi
Published in 2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) (25.08.2021)
Published in 2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) (25.08.2021)
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Conference Proceeding