Silicon end-effectors for microgripping tasks
Agnus, Joël, Hériban, David, Gauthier, Michaël, Pétrini, Valérie
Published in Precision engineering (01.10.2009)
Published in Precision engineering (01.10.2009)
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Journal Article
Design and fabrication of a multiple-thickness electrochemical cantilever sensor
Wu, Chang, Petrini, Valérie, Joseph, Eric, Amiot, Fabien
Published in Microelectronic engineering (01.05.2014)
Published in Microelectronic engineering (01.05.2014)
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Journal Article
A CMOS Compatible Ultrasonic Transducer Fabricated With Deep Reactive Ion Etching
Rufer, L., Domingues, C.C., Mir, S., Petrini, V., Jeannot, J.-C., Delobelle, P.
Published in Journal of microelectromechanical systems (01.12.2006)
Published in Journal of microelectromechanical systems (01.12.2006)
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Journal Article
High-Q and low TCF HBAR based on LiTaO3 substrate
Thomas, Baron, Gilles, Martin, Nicolas, Chretien, Valerie, Petrini, Guillaume, Combe, Fabien, Henrot, Florent, Bassignot, Alexandre, Reinhardt, Pierre-Patrick, Lassagne, Jean-Marc, Lesage, David, Rabus, Luc, Chommeloux, Sylvain, Ballandras
Published in 2014 IEEE International Frequency Control Symposium (FCS) (01.05.2014)
Published in 2014 IEEE International Frequency Control Symposium (FCS) (01.05.2014)
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Conference Proceeding
Experimental procedure to design stressed HBAR devices when the third-order elastic constants are not known
Thomas, Baron, Ludovic, Bebon, Valerie, Petrini, Gilles, Martin, Bernard, Dulmet, Jean-Marc, Lesage
Published in 2016 European Frequency and Time Forum (EFTF) (01.04.2016)
Published in 2016 European Frequency and Time Forum (EFTF) (01.04.2016)
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Conference Proceeding
Stress sensitivity coefficients of HBAR
Thomas, Baron, Valerie, Petrini, Gilles, Martin, Guillaume, Combe, Alexandre, Clairet, Bernard, Dulmet, Jean-Marc, Lesage, Thierry, Laroche, Sylvain, Ballandras
Published in 2015 Joint Conference of the IEEE International Frequency Control Symposium & the European Frequency and Time Forum (01.04.2015)
Published in 2015 Joint Conference of the IEEE International Frequency Control Symposium & the European Frequency and Time Forum (01.04.2015)
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Conference Proceeding
Phase noise measurements of AlN contour-mode resonators
Vaillant, Etienne, Sthal, Fabrice, Imbaud, Joel, Petrini, Valerie, Abbe, Philippe, Arapan, Lilia, Esnault, F. X., Cibiel, G., Piazza, Gianluca, Segovia-Fernandez, Jeronimo
Published in 2016 IEEE International Frequency Control Symposium (IFCS) (01.05.2016)
Published in 2016 IEEE International Frequency Control Symposium (IFCS) (01.05.2016)
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Conference Proceeding
Four d.o.f. Piezoelectric Microgripper Equipped With a Smart CMOS Camera
Tamadazte, B., Paindavoine, M., Agnus, J., Petrini, V., Le-Fort Piat, N.
Published in Journal of microelectromechanical systems (01.04.2012)
Published in Journal of microelectromechanical systems (01.04.2012)
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Journal Article
A mechanical de-tethering technique for silicon MEMS etched with a DRIE process
Hériban, D, Agnus, J, Petrini, V, Gauthier, M
Published in Journal of micromechanics and microengineering (01.05.2009)
Published in Journal of micromechanics and microengineering (01.05.2009)
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Journal Article
Silicon phononic crystal for surface acoustic waves
Benchabane, S., Khelif, A., Daniau, W., Robert, L., Petrini, V., Assouar, B., Vincent, B., Elmazria, O., Kruger, J., Laude, V.
Published in IEEE Ultrasonics Symposium, 2005 (2005)
Published in IEEE Ultrasonics Symposium, 2005 (2005)
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Conference Proceeding