Gettering of iron to implantation induced cavities and oxygen precipitates in silicon
MCHUGO, S. A, WEBER, E. R, MYERS, S. M, PETERSEN, G. A
Published in Journal of the Electrochemical Society (01.04.1998)
Published in Journal of the Electrochemical Society (01.04.1998)
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Journal Article
Chemical and electrical properties of cavities in silicon and germanium
Myers, S.M., Follstaedt, D.M., Petersen, G.A., Seager, C.H., Stein, H.J., Wampler, W.R.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.12.1995)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.12.1995)
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Journal Article
Strong segregation gettering of transition metals by implantation-formed cavities and boron-silicide precipitates in silicon
Myers, S.M., Petersen, G.A., Follstaedt, D.M., Headley, T.J., Michael, J.R., Seager, C.H.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.12.1996)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.12.1996)
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Journal Article
Metal gettering by boron-silicide precipitates in boron-implanted silicon
Myers, S.M., Petersen, G.A., Headley, T.J., Michael, J.R., Aselage, T.L., Seager, C.H.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.05.1997)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.05.1997)
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