by Yu-Wen Wang, Yeh, A., Pao-Chung Lin, Chin-Cheng Chien, Lin, C-H B., Xu, Z-Q J., Cheng, C-Y H., Sungchul Yoo, Lin, J., Mihardja, L., Perry-Sullivan, C.
Published in 2012 SEMI Advanced Semiconductor Manufacturing Conference (01.05.2012)

by Hsu, M F, Yang, J H, Yang, E, Chen, H, M. Ng, M. Li, Perry-Sullivan, C
Published in Semiconductor International (01.06.2009)