Search Results - "Perlitz, Sascha" :: K.UTB vyhledávací portál

Loading…

OPTICAL SYSTEM IN PARTICULAR FOR CHARACTERIZING A MICROLITHOGRAPHY MASK

by PERLITZ SASCHA, MATEJKA ULRICH, RUOFF JOHANNES
Year of Publication 19.07.2023

Get full text

Patent

Loading…

APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK

by PERLITZ SASCHA, WEI SHAO CHI, DEGUENTHER MARKUS, BLUMRICH JOERG FREDERIK, THALER THOMAS, RUOFF JOHANNES, MATEJKA ULRICH, FELDMANN HEIKO
Year of Publication 04.03.2024

Get full text

Patent

Loading…

APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK

by PERLITZ SASCHA, WEI SHAO CHI, DEGUENTHER MARKUS, BLUMRICH JOERG FREDERIK, THALER THOMAS, RUOFF JOHANNES, MATEJKA ULRICH, FELDMANN HEIKO
Year of Publication 28.12.2021

Get full text

Patent

Loading…

3D 3 METHOD FOR THREE-DIMENSIONALLY MEASURING A 3D AERIAL IMAGE OF A LITHOGRAPHY MASK

by HUSEMANN CHRISTOPH, PERLITZ SASCHA, MANN HANS JURGEN, MATEJKA ULRICH, RUOFF JOHANNES
Year of Publication 10.04.2017

Get full text

Patent

Loading…

METHOD AND APPARATUS FOR CHARACTERIZATION OF A MICROLITHOGRAPHY MASK

by Deguenther, Markus, Matejka, Ulrich, Perlitz, Sascha
Year of Publication 22.02.2024

Get full text

Patent

Loading…

Method for characterizing a structure on a mask and device for carrying out said method

by Perlitz Sascha
Year of Publication 28.03.2017

Get full text

Patent

Loading…

OPTICAL SYSTEM, IN PARTICULAR FOR CHARACTERIZING A MICROLITHOGRAPHY MASK

by Ruoff, Johannes, Matejka, Ulrich, Perlitz, Sascha
Year of Publication 13.07.2023

Get full text

Patent

Loading…

METHOD AND APPARATUS FOR CHARACTERIZATION OF A MICROLITHOGRAPHY MASK

by MATEJKA, Ulrich, PERLITZ, Sascha, DEGUENTHER, Markus
Year of Publication 01.12.2022

Get full text

Patent

Loading…

METHOD FOR CHARACTERIZING A STRUCTURE ON A MASK AND DEVICE FOR CARRYING OUT SAID METHOD

by PERLITZ SASCHA
Year of Publication 31.03.2016

Get full text

Patent

Loading…

Method for characterizing a structure on a mask and device for carrying out said method

by PERLITZ SASCHA
Year of Publication 15.12.2015

Get full text

Patent

Loading…

METHOD FOR CHARACTERIZING A STRUCTURE ON A MASK AND DEVICE FOR CARRYING OUT SAID METHOD

by PERLITZ SASCHA
Year of Publication 21.11.2013

Get full text

Patent

Loading…

APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK

by Blumrich, Joerg Frederik, Ruoff, Johannes, Thaler, Thomas, Wei, Shao-Chi, Feldmann, Heiko, Deguenther, Markus, Matejka, Ulrich, Perlitz, Sascha
Year of Publication 09.05.2024

Get full text

Patent

Loading…

METHOD FOR CHARACTERIZING A STRUCTURE ON A MASK AND DEVICE FOR CARRYING OUT SAID METHOD

by PERLITZ, SASCHA
Year of Publication 28.06.2012

Get full text

Patent

Loading…

Verfahren zur Charakterisierung einer Maske für die Mikrolithographie

by Degünther, Markus, Matejka, Ulrich, Perlitz, Sascha
Year of Publication 01.08.2024

Get full text

Patent

Loading…

Apparatus and method for characterizing a microlithographic mask

by Blumrich, Joerg Frederik, Ruoff, Johannes, Thaler, Thomas, Wei, Shao-Chi, Feldmann, Heiko, Deguenther, Markus, Matejka, Ulrich, Perlitz, Sascha
Year of Publication 27.02.2024

Get full text

Patent