Study of Emission Spectra of Cl-, Br-, and I-Containing Targets in the 3‒6.5 nm Spectral Range under Pulsed Laser Irradiation
Guseva, V. E., Garakhin, S. A., Nechai, A. N., Perekalov, A. A., Tsybin, N. N., Chkhalo, N. I.
Published in Bulletin of the Lebedev Physics Institute (01.12.2023)
Published in Bulletin of the Lebedev Physics Institute (01.12.2023)
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Journal Article
Emission Spectra of Liquid-Jet Targets of Hexane C6H14, Dichloromethane CH2Cl2, Methylene Bromide CH3Br in the Range 4–20 nm under Pulsed Laser Excitation
Guseva, V. E., Nechay, A. N., Perekalov, A. A., Salashchenko, N. N., Chkhalo, N. I.
Published in Optics and spectroscopy (01.10.2023)
Published in Optics and spectroscopy (01.10.2023)
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Journal Article
Emission Spectra of Molecular Gases CHF3, CCl2F2, SF6 in the Range 3–20 nm under Pulsed Laser Excitation Using Various Gas Jets as Targets
Guseva, V. E., Nechay, A. N., Perekalov, A. A., Salashchenko, N. N., Chkhalo, N. I.
Published in Optics and spectroscopy (01.06.2023)
Published in Optics and spectroscopy (01.06.2023)
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Journal Article
On the Prospects of Lithography in the Region of Wavelengths Shorter than 13.5 nm
Chkhalo, N. I., Durov, K. V., Nechay, A. N., Perekalov, A. A., Polkovnikov, V. N., Salashchenko, N. N.
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.12.2023)
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.12.2023)
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Journal Article
Emission Characteristics of a Laser-Plasma Source of Extreme Ultraviolet Radiation with Thin-Film Targets
Lopatin, A. Ya, Luchin, V. I., Nachay, A. N., Perekalov, A. A., Pestov, A. E., Salashchenko, N. N., Soloviev, A. A., Tsybin, N. N., Chkhalo, N. I.
Published in Technical physics (01.05.2024)
Published in Technical physics (01.05.2024)
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Journal Article
Thin Film Al Targets for a Laser-Plasma Source of Extreme Ultraviolet Radiation
Garakhin, S. A., Lopatin, A. Ya, Nechay, A. N., Perekalov, A. A., Pestov, A. E., Salashchenko, N. N., Tsybin, N. N., Chkhalo, N. I.
Published in Technical physics (01.02.2024)
Published in Technical physics (01.02.2024)
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Journal Article
Emission Properties of Laser Plasma Excited on Molecular-Cluster Carbon Dioxide Jets
Nechai, A. N., Perekalov, A. A., Chkhalo, N. I., Salashchenko, N. N.
Published in Technical physics (01.11.2019)
Published in Technical physics (01.11.2019)
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Journal Article
Methods for Forming Gas, Cluster Spray, and Liquid Targets in a Laser-Plasma Radiation Source
Guseva, V. E., Korepanov, M. A., Koroleva, M. R., Nechay, A. N., Perekalov, A. A., Salashchenko, N. N., Chkhalo, N. I.
Published in Instruments and experimental techniques (New York) (01.08.2023)
Published in Instruments and experimental techniques (New York) (01.08.2023)
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Measurements of the Absolute Values of the Radiation Intensity in the Wavelength Range of 6.6–32 nm of Stainless Steel Targets with Pulsed Laser Excitation
Garakhin, S. A., Zabrodin, I. G., Zuev, S. Yu, Lopatin, A. Ya, Nechai, A. N., Pestov, A. E., Perekalov, A. A., Pleshkov, R. S., Polkovnikov, V. N., Salaschenko, N. N., Smertin, R. M., Tsybin, N. N., Chkhalo, N. I.
Published in Technical physics (2024)
Published in Technical physics (2024)
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Journal Article
On the Formation of an Anti-Reflection Layer on the Surface of Single-Crystal Silicon by Ion-Beam Etching
Zorina, M. V., Kraev, S. A., Lopatin, A. Ya, Mikhailenko, M. S., Okhapkin, A. I., Perekalov, A. A., Pestov, A. E., Chernyshev, A. K., Chkhalo, N. I., Kuznetsov, I. I.
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.12.2023)
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.12.2023)
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Journal Article
Imaging System of a Plasma Torch of a Betatron X-Ray Source
Antyushin, E. S., Akhsakhalyan, A. A., Zuev, S. Yu, Lopatin, A. Ya, Malyshev, I. V., Nechay, A. N., Perekalov, A. A., Pestov, A. E., Salashchenko, N. N., Toropov, M. N., Ulasevich, B. A., Tsybin, N. N., Chkhalo, N. I., Soloviev, A. A., Starodubtsev, M. V.
Published in Technical physics (2024)
Published in Technical physics (2024)
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Journal Article
Observation of Laser-Induced Spark in the Density Jump in a Gas-Jet Target
Nechai, A. N., Perekalov, A. A., Chkhalo, N. I., Salashchenko, N. N.
Published in Technical physics letters (01.10.2019)
Published in Technical physics letters (01.10.2019)
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