Interference signal demodulation for nanopositioning and nanomeasuring machines
Hausotte, T, Percle, B, Gerhardt, U, Dontsov, D, Manske, E, Jäger, G
Published in Measurement science & technology (01.07.2012)
Published in Measurement science & technology (01.07.2012)
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Journal Article
Measuring value correction and uncertainty analysis for homodyne interferometers
Hausotte, T, Percle, B, Manske, E, Füßl, R, Jäger, G
Published in Measurement science & technology (01.09.2011)
Published in Measurement science & technology (01.09.2011)
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Journal Article