The Role of Polysilicon Slurry and Its Application in 7nm CMP
Chao, Tai Fong, Penigalapati, Dinesh, Yang, JI Chul, Huang, Haigou, Koli, Dinesh R
Published in ECS transactions (26.04.2017)
Published in ECS transactions (26.04.2017)
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Journal Article
Cobalt CMP Development for 7nm Logic Device
Wu, Changhong, Han, Ja-Hyung, Shi, Xingzhao, Koli, Dinesh R, Penigalapati, Dinesh
Published in ECS transactions (26.04.2017)
Published in ECS transactions (26.04.2017)
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Journal Article
Storage Temperature Effects on the Slurry Health Parameters and SiO2 Removal Rates during Chemical Mechanical Polishing
Seo, Jihoon, Othman, Ali, Kim, Hong Jin, Devabhaktuni, Jainendra, Trivedi, Rahul, Penigalapati, Dinesh, Kulasingam, Thayalan, Hanup Vegi, S. S. R. K., Babu, S. V.
Published in ECS journal of solid state science and technology (01.10.2021)
Published in ECS journal of solid state science and technology (01.10.2021)
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Journal Article
Storage Temperature Effects on the Slurry Health Parameters and SiO 2 Removal Rates during Chemical Mechanical Polishing
Seo, Jihoon, Othman, Ali, Kim, Hong Jin, Devabhaktuni, Jainendra, Trivedi, Rahul, Penigalapati, Dinesh, Kulasingam, Thayalan, Hanup Vegi, S. S. R. K., Babu, S. V.
Published in ECS journal of solid state science and technology (01.10.2021)
Published in ECS journal of solid state science and technology (01.10.2021)
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Journal Article
Study of sol-gel type ceria particle for CMP process in leading-edge CMOS device: YE: Yield enhancement/learning
Penigalapati, Dinesh Kumar, Yang, Ji Chul, Jha, Amarnath, Chao, Tai Fong, Koli, Dinesh
Published in 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2017)
Published in 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2017)
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Conference Proceeding
The Role of Polysilicon Slurry and Its Application in 7nm CMP
Chao, Tai Fong, Penigalapati, Dinesh, Yang, JI Chul, Huang, Haigou, Koli, Dinesh R
Published in Meeting abstracts (Electrochemical Society) (15.04.2017)
Published in Meeting abstracts (Electrochemical Society) (15.04.2017)
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Journal Article
Cobalt CMP Development for 7nm Logic Device
Wu, Changhong, Han, Ja-Hyung, Shi, Xingzhao, Koli, Dinesh R, Penigalapati, Dinesh
Published in Meeting abstracts (Electrochemical Society) (15.04.2017)
Published in Meeting abstracts (Electrochemical Society) (15.04.2017)
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Journal Article
Challenges in Chemical Mechanical Planarization defects of 7nm device and its improvement opportunities
Ji Chul Yang, Penigalapati, Dinesh, Tai Fong Chao, Wen Yin Lu, Koli, Dinesh
Published in 2017 China Semiconductor Technology International Conference (CSTIC) (01.03.2017)
Published in 2017 China Semiconductor Technology International Conference (CSTIC) (01.03.2017)
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Conference Proceeding
Germanium smoothing and chemical mechanical planarization processes
Oishi Yohei, Yamanaka Tatsuya, Tornello James A, Krishnan Mahadevaiyer, Steiner Rachel S, Kawamoto Tatsuyoshi, Penigalapati Dinesh Kumar
Year of Publication 13.02.2018
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Year of Publication 13.02.2018
Patent
GERMANIUM SMOOTHING AND CHEMICAL MECHANICAL PLANARIZATION PROCESSES
Oishi Yohei, Yamanaka Tatsuya, Tornello James A, Krishnan Mahadevaiyer, Steiner Rachel S, Kawamoto Tatsuyoshi, Penigalapati Dinesh Kumar
Year of Publication 03.08.2017
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Year of Publication 03.08.2017
Patent
Germanium smoothing and chemical mechanical planarization processes
Oishi Yohei, Yamanaka Tatsuya, Tornello James A, Krishnan Mahadevaiyer, Steiner Rachel S, Kawamoto Tatsuyoshi, Penigalapati Dinesh Kumar
Year of Publication 09.05.2017
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Year of Publication 09.05.2017
Patent
GERMANIUM SMOOTHING AND CHEMICAL MECHANICAL PLANARIZATION PROCESSES
Oishi Yohei, Yamanaka Tatsuya, Tornello James A, Krishnan Mahadevaiyer, Steiner Rachel S, Kawamoto Tatsuyoshi, Penigalapati Dinesh Kumar
Year of Publication 20.04.2017
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Year of Publication 20.04.2017
Patent
Shallow trench isolation chemical mechanical planarization
CUMMINGS JASON E, NALASKOWSKI JAKUB W, KOLI DINESH R, KRISHNAN MAHADEVAIYER, NODA MASAHIRO, YAMANAKA TATSUYA, CHARNS LESLIE, HUPKA LUKASZ J, PENIGALAPATI DINESH K, KONNO TOMOHISA, LOFARO MICHAEL F
Year of Publication 30.07.2013
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Year of Publication 30.07.2013
Patent