Threshold voltage tuning by metal gate work function modulation for 10 nm CMOS integration and beyond
Yoshida, Naomi, Keping Han, Peng-Fu Hsu, Beach, Matthew, Xinliang Lu, Hung, Raymond, Mao, Daxin, Hao Chen, Wei Tang, Yu Lei, Jing Zhou, Noori, Atif, Miao Jin, Kun Xu, Phatak, Anup, Shiyu Sun, Hassan, Sajjad, Gandikota, Srinivas, Chorng-Ping Chang, Brand, Adam
Published in Proceedings of Technical Program - 2014 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) (01.04.2014)
Published in Proceedings of Technical Program - 2014 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) (01.04.2014)
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Conference Proceeding
Synthesis and Characterization of Allyl(β-ketoiminato)palladium(II) Complexes: New Precursors for Chemical Vapor Deposition of Palladium Thin Films
Tung, Yeng-Lien, Tseng, Wen-Cheng, Lee, Chi-Young, Hsu, Peng-Fu, Chi, Yun, Peng, Shie-Ming, Lee, Gene-Hsiang
Published in Organometallics (01.03.1999)
Published in Organometallics (01.03.1999)
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Journal Article
Organometallic Ruthenium Source Reagents for CVD
Lee, F.-J., Chi, Y., Liu, C.-S., Hsu, P.-F., Chou, T.-Y., Peng, S.-M., Lee, G.-H.
Published in Chemical vapor deposition (01.05.2001)
Published in Chemical vapor deposition (01.05.2001)
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Journal Article
Metal gate work function modulation by ion implantation for multiple threshold voltage FinFET devices
Keping Han, Peng-Fu Hsu, Beach, Matthew, Henry, Todd, Yoshida, Naomi, Brand, Adam
Published in 2013 13th International Workshop on Junction Technology (IWJT) (01.06.2013)
Published in 2013 13th International Workshop on Junction Technology (IWJT) (01.06.2013)
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Conference Proceeding
Observation of Reliability of HfZrO X Gate Dielectric Devices with Different Zr/Hf Ratios
Liao, Jing-Chyi, Fang, Yean-Kuen, Hou, Yong Tian, Tseng, Wei Hsiung, Yang, Chih I., Hsu, Peng Fu, Chao, Yuen Shun, Lin, Kang Cheng, Huang, Kuo Tai, Lee, Tzu Liang, Liang, Meng Sung
Published in Japanese Journal of Applied Physics (01.04.2008)
Published in Japanese Journal of Applied Physics (01.04.2008)
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Journal Article