Continuous Image Writer with improved critical dimension performance for high-accuracy maskless optical patterning
Paufler, J., Brunn, St, Körner, T., Kühling, F.
Published in Microelectronic engineering (01.09.2001)
Published in Microelectronic engineering (01.09.2001)
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Conference Proceeding
New system for fast submicron optical direct writing
Seltmann, R., Doleschal, W., Gehner, A., Kück, H., Melcher, R., Paufler, J., Zimmer, G.
Published in Microelectronic engineering (01.01.1996)
Published in Microelectronic engineering (01.01.1996)
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Conference Proceeding
In-chip overlay metrology in 90 nm production
Schulz, B., Seltmann, R., Paufler, J., Leray, P., Frommer, A., Izikson, P., Kassel, E., Adel, M.
Published in ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005 (2005)
Published in ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005 (2005)
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Conference Proceeding
Deformable micromirror devices as phase-modulating high-resolution light valves
Kück, H, Doleschal, W, Gehner, A, Grundke, W, Melcher, R, Paufler, J, Seltmann, R, Zimmer, G
Published in Sensors and actuators. A. Physical. (01.06.1996)
Published in Sensors and actuators. A. Physical. (01.06.1996)
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Journal Article
High-throughput optical direct write lithography
PAUFLER, J, KÜCK, H, SELTMANN, R, DOLESCHAL, W, GEHNER, A, ZIMMER, O
Published in Solid state technology (01.06.1997)
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Published in Solid state technology (01.06.1997)
Magazine Article
Deformable Micromirror Devices As Phase Modulating High Resolution Light Valves
Kuck, H., Doleschal, W., Gehner, A., Geundke, W., Melcher, R., Paufler, J., Seltmann, R., Zimmer, G.
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
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