Impact of Pad Material Properties on CMP Performance for Sub-10nm Technologies
Khanna, Aniruddh J., Kakireddy, Raghava, Jawali, Puneet, Chockalingam, Ashwin, Redfield, Daniel, Bajaj, Rajeev, Fung, Jason, Cornejo, Mario, Yamamura, Mayu, Yuan, Zhibo, Orilall, Chris, Fu, Boyi, Ganapathi, Gana, Redeker, Fred C, Patibandla, Nag B
Published in ECS journal of solid state science and technology (2019)
Published in ECS journal of solid state science and technology (2019)
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Journal Article
METHOD AND APPARATUS FOR DEPOSITION OF MULTILAYER DEVICE WITH SUPERCONDUCTIVE FILM
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Year of Publication 20.09.2024
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Year of Publication 20.09.2024
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마이크로-LED들용 색 변환 층들에서의 양자점 전구체 재료들을 위한 킬레이트제들
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Year of Publication 02.05.2023
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Year of Publication 02.05.2023
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UV-LED 경화를 위한 티올계 가교제들을 갖는 양자점 배합물들
LUO YINGDONG, GANAPATHIAPPAN SIVAPACKIA, PATIBANDLA NAG B, NG HOU T, ZHANG DAIHUA
Year of Publication 24.03.2023
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Year of Publication 24.03.2023
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서브픽셀 크로스토크를 감소시키는 마이크로 LED 디스플레이들 및 제조 방법들
PATIBANDLA NAG B, KWAK BYUNG SUNG, ZHU MINGWEI, NG HOU T, XU LISONG, BENCHER CHRISTOPHER DENNIS
Year of Publication 17.11.2023
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Year of Publication 17.11.2023
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SYSTEMS AND METHODS FOR TRANSFER OF MICRO-DEVICES
GANAPATHIAPPAN SIVAPACKIA, FU BOYI, PATIBANDLA NAG B, ZHU MINGWEI, NG HOU T
Year of Publication 20.05.2022
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Year of Publication 20.05.2022
Patent
CMP PAD CONSTRUCTION WITH COMPOSITE MATERIAL PROPERTIES USING ADDITIVE MANUFACTURING PROCESSES
PATIBANDLA NAG B, BAJAJ RAJEEV, ORILALL MAHENDRA C, REDFIELD DANIEL, PERRY RUSSELL EDWARD, MENK GREGORY E, FUNG JASON G, KRISHNAN KASIRAMAN, REDEKER FRED C, DAVENPORT ROBERT E
Year of Publication 02.02.2024
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Year of Publication 02.02.2024
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POROUS CHEMICAL MECHANICAL POLISHING PADS
GANAPATHIAPPAN SIVAPACKIA, FU BOYI, CHOCKALINGAM ASHWIN, PATIBANDLA NAG B, BAJAJ RAJEEV, ORILALL MAHENDRA C, REDFIELD DANIEL, YAMAMURA MAYU, REDEKER FRED C
Year of Publication 02.02.2024
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Year of Publication 02.02.2024
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POLISHING PAD WITH WINDOW AND MANUFACTURING METHODS THEREOF
CORNEJO MARIO DAGIO, FU BOYI, GANAPATHIAPPAN SIVAPACKIA, CHOCKALINGAM ASHWIN, PATIBANDLA NAG B, BAJAJ RAJEEV, BENVEGNU DOMINIC J, REDFIELD DANIEL, VORA ANKIT, YAMAMURA MAYU
Year of Publication 01.02.2024
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Year of Publication 01.02.2024
Patent
개선된 기공 구조를 갖는 연마 패드들
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Year of Publication 22.01.2024
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Year of Publication 22.01.2024
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발광 디바이스들을 위한 색 변환 층들
LUO YINGDONG, GANAPATHIAPPAN SIVAPACKIA, PATIBANDLA NAG B, ZHU MINGWEI, NG HOU T, ZHANG DAIHUA
Year of Publication 28.12.2021
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Year of Publication 28.12.2021
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GAN- PVD ALN OXYGEN CONTROLLED PVD ALN BUFFER FOR GAN-BASED OPTOELECTRONIC AND ELECTRONIC DEVICES
DIEHL DANIEL LEE, PATIBANDLA NAG B, WANG RONGJUN, ZHU MINGWEI, AGRAWAL VIVEK, SUBRAMANI ANANTHA
Year of Publication 24.12.2021
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Year of Publication 24.12.2021
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리세스 내의 컬러 변환 층의 인-시튜 경화
LUO YINGDONG, GANAPATHIAPPAN SIVAPACKIA, PATIBANDLA NAG B, ZHU MINGWEI, NG HOU T, ZHANG DAIHUA
Year of Publication 21.12.2021
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Year of Publication 21.12.2021
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컬러 변환 층의 인-시튜 경화
LUO YINGDONG, GANAPATHIAPPAN SIVAPACKIA, PATIBANDLA NAG B, ZHU MINGWEI, NG HOU T, ZHANG DAIHUA
Year of Publication 16.12.2021
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Year of Publication 16.12.2021
Patent
초전도 막을 갖는 다층 디바이스의 증착을 위한 방법 및 장치
DIEHL DANIEL LEE, PATIBANDLA NAG B, CAO YONG, YANG ZIHAO, CHEN ZHEBO, ZHU MINGWEI, GODET LUDOVIC
Year of Publication 29.10.2021
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Year of Publication 29.10.2021
Patent