Search Results - "Patalay Kailash Kiran" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

A COATED LINER ASSEMBLY FOR A SEMICONDUCTOR PROCESSING CHAMBER

A COATED LINER ASSEMBLY FOR A SEMICONDUCTOR PROCESSING CHAMBER

by PATALAY KAILASH KIRAN, BRILLHART PAUL, RANISH JOSEPH M, KUPPURAO SATHEESH
Year of Publication 03.02.2016

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Patent

PYROMETRY FOR SUBSTRATE PROCESSING

PYROMETRY FOR SUBSTRATE PROCESSING

by ADAMS BRUCE E, PATALAY KAILASH KIRAN, HUNTER AARON MUIR
Year of Publication 31.08.2011

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Patent

ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER

ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER

by PATALAY KAILASH KIRAN, HALPIN RICHARD, FEIGEL EDDIE, LO KIN PONG, REDFIELD DANIEL, RAMACHANDRAN BALASUBRAMANIAN, BRILLHART PAUL, OLSEN MICHAEL, MACK JAMES FRANCIS, VETORINO BRETT, KUPPURAO SATHEESH, RANISH JOSEPH M
Year of Publication 04.03.2016

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Patent

QUARTZ UPPER AND LOWER DOMES

QUARTZ UPPER AND LOWER DOMES

by ABOAGYE STEVE, SAMIR MEHMET TUGRUL, CARLSON DAVID K, NGUYEN ANH N, SEREBRYANOV OLEG, CHANG ANZHONG, BRILLHART PAUL, LAU SHU KWAN, RANISH JOSEPH M, PATALAY KAILASH KIRAN, ZHU ZUOMING, IU DONGMING, KUMAR SURAJIT, KUPPURAO SATHEESH, DINIZ HERMAN
Year of Publication 25.09.2015

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Patent

CVD REACTOR WITH MULTIPLE PROCESSING LEVELS AND DUAL-AXIS MOTORIZED LIFT MECHANISM

CVD REACTOR WITH MULTIPLE PROCESSING LEVELS AND DUAL-AXIS MOTORIZED LIFT MECHANISM

by BAUTISTA KEVIN J, PATALAY KAILASH KIRAN, HUANG YI CHIAU, WEBB JOHN S, ZHOU ZHI YUAN, MYO NYI OO, SANCHEZ ERROL C, YU WILSON, COLLINS RICHARD O
Year of Publication 30.05.2011

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Patent

Low temperature measurement and control using low temperature pyrometry

Low temperature measurement and control using low temperature pyrometry

by PATALAY KAILASH KIRAN
Year of Publication 03.03.2015

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Patent

MODEL BASED LAMP BACKGROUND FILTRATION OF STRAY RADIATION FOR PYROMETRY

MODEL BASED LAMP BACKGROUND FILTRATION OF STRAY RADIATION FOR PYROMETRY

by PATALAY Kailash Kiran, HUNTER Aaron Muir
Year of Publication 15.02.2018

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Patent

Model based lamp background filtration of stray radiation for pyrometry

Model based lamp background filtration of stray radiation for pyrometry

by Hunter Aaron Muir, Patalay Kailash Kiran
Year of Publication 22.08.2017

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Patent

A coated liner assembly for a semiconductor processing chamber

A coated liner assembly for a semiconductor processing chamber

by BRILLHART, PAUL, KUPPURAO, SATHEESH, PATALAY, KAILASH KIRAN, RANISH, JOSEPH M
Year of Publication 11.06.2023

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Patent

LOW TEMPERATURE MEASUREMENT AND CONTROL USING LOW TEMPERATURE PYROMETRY

LOW TEMPERATURE MEASUREMENT AND CONTROL USING LOW TEMPERATURE PYROMETRY

by PATALAY KAILASH KIRAN
Year of Publication 09.08.2012

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Patent

A coated liner assembly for a semiconductor processing chamber

A coated liner assembly for a semiconductor processing chamber

by BRILLHART, PAUL, KUPPURAO, SATHEESH, PATALAY, KAILASH KIRAN, RANISH, JOSEPH M
Year of Publication 16.02.2023

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Patent

A COATED LINER ASSEMBLY FOR A SEMICONDUCTOR PROCESSING CHAMBER

A COATED LINER ASSEMBLY FOR A SEMICONDUCTOR PROCESSING CHAMBER

by KUPPURAO, Satheesh, PATALAY, Kailash, Kiran, BRILLHART, Paul, RANISH, Joseph, M
Year of Publication 28.12.2017

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Patent

A coated liner assembly for a semiconductor processing chamber

A coated liner assembly for a semiconductor processing chamber

by BRILLHART, PAUL, KUPPURAO, SATHEESH, PATALAY, KAILASH KIRAN, RANISH, JOSEPH M
Year of Publication 01.11.2022

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Patent

A coated liner assembly for a semiconductor processing chamber

A coated liner assembly for a semiconductor processing chamber

by BRILLHART, PAUL, KUPPURAO, SATHEESH, PATALAY, KAILASH KIRAN, RANISH, JOSEPH M
Year of Publication 16.02.2022

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Patent

Wafer processing hardware for epitaxial deposition with reduced backside deposition and defects

Wafer processing hardware for epitaxial deposition with reduced backside deposition and defects

by PATALAY KAILASH KIRAN, METZNER CRAIG, VATUS JEAN
Year of Publication 10.02.2015

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Patent

MODEL BASED LAMP BACKGROUND FILTRATION OF STRAY RADIATION FOR PYROMETRY

MODEL BASED LAMP BACKGROUND FILTRATION OF STRAY RADIATION FOR PYROMETRY

by PATALAY KAILASH KIRAN, HUNTER AARON MUIR
Year of Publication 22.01.2015

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Patent

A coated liner assembly for a semiconductor processing chamber

A coated liner assembly for a semiconductor processing chamber

by BRILLHART, PAUL, KUPPURAO, SATHEESH, PATALAY, KAILASH KIRAN, RANISH, JOSEPH M
Year of Publication 11.11.2021

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Patent

A COATED LINER ASSEMBLY FOR A SEMICONDUCTOR PROCESSING CHAMBER

A COATED LINER ASSEMBLY FOR A SEMICONDUCTOR PROCESSING CHAMBER

by PATALAY, KAILASH, KIRAN, BRILLHART, PAUL, RANISH, JOSEPH, M, KUPPURAO, SATHEESH
Year of Publication 30.12.2015

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Patent

A coated liner assembly for a semiconductor processing chamber

A coated liner assembly for a semiconductor processing chamber

by PATALAY KAILASH KIRAN, BRILLHART PAUL, RANISH JOSEPH M, KUPPURAO SATHEESH
Year of Publication 30.12.2015

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Patent

Method for low temperature measurement and control using low temperature pyrometry

Method for low temperature measurement and control using low temperature pyrometry

by PATALAY, KAILASH KIRAN
Year of Publication 21.10.2015

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Patent