Area-Selective Atomic Layer Deposition of Ru Using Carbonyl-Based Precursor and Oxygen Co-Reactant: Understanding Defect Formation Mechanisms
Lodha, Jayant Kumar, Meersschaut, Johan, Pasquali, Mattia, Billington, Hans, Gendt, Stefan De, Armini, Silvia
Published in Nanomaterials (Basel, Switzerland) (16.07.2024)
Published in Nanomaterials (Basel, Switzerland) (16.07.2024)
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Journal Article
Area-Selective Deposition of AlOx and Al-Silicate for Fully Self-Aligned Via Integration
Pasquali, Mattia, Brady-Boyd, Anita, Leśniewska, Alicja, Carolan, Patrick, Conard, Thierry, O'Connor, Robert, De Gendt, Stefan, Armini, Silvia
Published in ACS applied materials & interfaces (01.02.2023)
Published in ACS applied materials & interfaces (01.02.2023)
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Journal Article
Area-Selective Deposition of AlO x and Al-Silicate for Fully Self-Aligned Via Integration
Pasquali, Mattia, Brady-Boyd, Anita, Leśniewska, Alicja, Carolan, Patrick, Conard, Thierry, O’Connor, Robert, De Gendt, Stefan, Armini, Silvia
Published in ACS applied materials & interfaces (01.02.2023)
Published in ACS applied materials & interfaces (01.02.2023)
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Journal Article
CMOS-Compatible Contacts to n-InP
Ghegin, Elodie, Rodriguez, Philippe, Pasquali, Mattia, Sagnes, Isabelle, Labar, Janos L., Delaye, Vincent, Card, Tiphaine, Da Fonseca, Jeremy, Jany, Christophe, Nemouchi, Fabrice
Published in IEEE transactions on electron devices (01.11.2017)
Published in IEEE transactions on electron devices (01.11.2017)
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Journal Article
Nanomechanical Characterization of Organic Surface Passivation Films on 50 nm Patterns during Area-Selective Deposition
Pasquali, Mattia, Sergeant, Stefanie, Conard, Thierry, Spampinato, Valentina, Viva, Alessandro, De Gendt, Stefan, Armini, Silvia
Published in ACS applied electronic materials (22.06.2021)
Published in ACS applied electronic materials (22.06.2021)
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Journal Article
Understanding Selectivity Loss Mechanisms in Selective Material Deposition by Area Deactivation on 10 nm Cu/SiO 2 Patterns
Pasquali, Mattia, Carolan, Patrick, Sergeant, Stefanie, Meersschaut, Johan, Spampinato, Valentina, Conard, Thierry, Viva, Alessandro, De Gendt, Stefan, Armini, Silvia
Published in ACS applied electronic materials (26.04.2022)
Published in ACS applied electronic materials (26.04.2022)
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Journal Article
Understanding Selectivity Loss Mechanisms in Selective Material Deposition by Area Deactivation on 10 nm Cu/SiO2 Patterns
Pasquali, Mattia, Carolan, Patrick, Sergeant, Stefanie, Meersschaut, Johan, Spampinato, Valentina, Conard, Thierry, Viva, Alessandro, De Gendt, Stefan, Armini, Silvia
Published in ACS applied electronic materials (26.04.2022)
Published in ACS applied electronic materials (26.04.2022)
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Journal Article
(Invited) Area-Selective Atomic Layer Deposition for Interconnect Applications
Pasquali, Mattia, De Gendt, Stefan, Armini, Silvia
Published in Meeting abstracts (Electrochemical Society) (19.10.2021)
Published in Meeting abstracts (Electrochemical Society) (19.10.2021)
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Journal Article
Aggressive behaviour of solid-pseudopapillary tumor of the pancreas in adults：A case report and review of the literature
Sperti, Cosimo, Berselli, Mattia, Pasquali, Claudio, Pastorelli, Davide, Pedrazzoli, Sergio
Published in World journal of gastroenterology : WJG (14.02.2008)
Published in World journal of gastroenterology : WJG (14.02.2008)
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Journal Article