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"Parkhe, Vijay D"
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탈착가능 샤프트를 갖는 정전 척
by
PARKHE VIJAY D
Year of Publication
26.06.2024
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산화를 완화시키는 격리된 환경들을 갖는 내부 샤프트 영역들을 갖는 기판 지지 조립체들
by
PARKHE VIJAY D
Year of Publication
24.05.2024
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극저온 마이크로-존 정전기 척 커넥터 조립체
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PARKHE VIJAY D
Year of Publication
12.01.2024
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차별화된 세라믹들을 갖는 정전 척
by
PARKHE VIJAY D
Year of Publication
17.10.2023
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금속 접합을 갖는 정전 척
by
PARKHE VIJAY D
Year of Publication
05.10.2023
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SUBSTRATE SUPPORT ASSEMBLY FOR HIGH TEMPERATURE PROCESSES
by
PARKHE VIJAY D
Year of Publication
24.08.2023
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ELECTROSTATIC PUCK ASSEMBLY WITH METAL BONDED BACKING PLATE FOR HIGH TEMPERATURE PROCESSES
by
PARKHE VIJAY D
Year of Publication
08.05.2023
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ELECTROSTATIC PUCK ASSEMBLY WITH METAL BONDED BACKING PLATE FOR HIGH TEMPERATURE PROCESSES
by
PARKHE VIJAY D
Year of Publication
13.03.2023
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ELECTROSTATIC CHUCK ASSEMBLY FOR HIGH TEMPERATURE PROCESSES
by
PARKHE VIJAY D
Year of Publication
10.03.2023
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다공성 플러그 본딩
by
PARKHE VIJAY D
Year of Publication
24.02.2023
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극저온 응용들을 위한 정전 척 조립체
by
PARKHE VIJAY D
Year of Publication
21.02.2023
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내부 채널들을 갖는 반도체 기판 지지부
by
PARKHE VIJAY D
Year of Publication
13.12.2022
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고온 마이크로-존 정전 척
by
PARKHE VIJAY D
Year of Publication
01.12.2022
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기판 지지부를 위한 통합 전극 및 접지 평면
by
PARKHE VIJAY D
Year of Publication
03.06.2022
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메사들을 갖는 정전 척
by
AGARWAL ASHUTOSH
,
PARKHE VIJAY D
Year of Publication
18.12.2023
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금속 샤프트를 갖는 정전 척
by
AGARWAL ASHUTOSH
,
PARKHE VIJAY D
Year of Publication
30.10.2023
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INCREASING THE GAS EFFICIENCY FOR AN ELECTROSTATIC CHUCK
by
PARKHE VIJAY D
Year of Publication
08.03.2022
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SUBSTRATE CARRIER
by
PARKHE VIJAY D
Year of Publication
14.07.2021
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E BONDING STRUCTURE OF E CHUCK TO ALUMINUM BASE CONFIGURATION
by
LINDLEY ROGER ALAN
,
PARKHE VIJAY D
Year of Publication
28.05.2024
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듀얼 로드 락 구성에서의 고온 가열식 지지 페데스탈
by
PARKHE VIJAY D
Year of Publication
29.04.2020
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